Early Growth Stages of Aluminum Oxide (Al2O3) Insulating Layers by Thermal- and Plasma-Enhanced Atomic Layer Deposition on AlGaN/GaN Heterostructures
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2008 ◽
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2010 ◽
Vol 20
(18)
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pp. 3099-3105
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2012 ◽
Vol 30
(1)
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pp. 01A127
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2021 ◽
Vol 39
(5)
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pp. 052804
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