Wafer-scale growth of MoS2thin films by atomic layer deposition

Nanoscale ◽  
2016 ◽  
Vol 8 (20) ◽  
pp. 10792-10798 ◽  
Author(s):  
Jung Joon Pyeon ◽  
Soo Hyun Kim ◽  
Doo Seok Jeong ◽  
Seung-Hyub Baek ◽  
Chong-Yun Kang ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Scale Growth ◽  
Wafer Scale ◽  
Layer Deposition

Low-temperature wafer-scale synthesis of two-dimensional SnS2

Nanoscale ◽  
2018 ◽  
Vol 10 (37) ◽  
pp. 17712-17721 ◽  
Author(s):  
Jung Joon Pyeon ◽  
In-Hwan Baek ◽  
Weon Cheol Lim ◽  
Keun Hwa Chae ◽  
Seong Ho Han ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Two Dimensional ◽  
Wafer Scale ◽  
Layer Deposition

Two-dimensional continuous SnS2 is synthesized over a wafer at low-temperature (≤350 °C) by sulfurization combined with atomic layer deposition.

Wafer-scale colloidal lithography based on self-assembly of polystyrene nanospheres and atomic layer deposition

2010 ◽  
Vol 20 (24) ◽  
pp. 5025 ◽  
Author(s):  
Jeong Rok Oh ◽  
Jung Ho Moon ◽  
Hoo Keun Park ◽  
Jae Hyoung Park ◽  
Haegeun Chung ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Self Assembly ◽  
Atomic Layer ◽  
Colloidal Lithography ◽  
Wafer Scale ◽  
Layer Deposition ◽  
Polystyrene Nanospheres

Layer-Controlled, Wafer-Scale, and Conformal Synthesis of Tungsten Disulfide Nanosheets Using Atomic Layer Deposition

ACS Nano ◽  
2013 ◽  
Vol 7 (12) ◽  
pp. 11333-11340 ◽  
Author(s):  
Jeong-Gyu Song ◽  
Jusang Park ◽  
Wonseon Lee ◽  
Taejin Choi ◽  
Hanearl Jung ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Tungsten Disulfide ◽  
Wafer Scale ◽  
Layer Deposition

Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition

2016 ◽  
Vol 365 ◽  
pp. 160-165 ◽  
Author(s):  
Yujin Jang ◽  
Seungmin Yeo ◽  
Han-Bo-Ram Lee ◽  
Hyungjun Kim ◽  
Soo-Hyun Kim
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Wafer Scale ◽  
Layer Deposition ◽  
Direct Growth
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