The quality factor of quartz DETF for resonant sensors: simulation, analysis and verification

Author(s):  
Cun Li ◽  
Quanwei Zhang ◽  
Yulong Zhao ◽  
Chuan Tian ◽  
Bo Li ◽  
...  
2013 ◽  
Vol 722 ◽  
pp. 198-201
Author(s):  
Cai Feng Liu ◽  
Fu Gui Yan ◽  
Di Feng Lu ◽  
Yang Mei

To improve the read performance of RFID tags,improve the quality factor is very important. Firstly,from theory and practical, confirmed that quality factor Q is very important for RFID tags,a higher Q means the tag could have a good performance. Then,through calculations and simulation,analysis the influence factors of Q. With simulation figures show that length, width, space, thickness of the tags coil all affect the Q,but when manufacturing of tags , the control of manufacturing quality and accuracy is very difficultly. Finally, shows many figures about tags manufacturing quality and accuracy of manufacturing which have lower Q and badly read performance.


Sensors ◽  
2020 ◽  
Vol 21 (1) ◽  
pp. 149
Author(s):  
Savannah R. Eisner ◽  
Cailin A. Chapin ◽  
Ruochen Lu ◽  
Yansong Yang ◽  
Songbin Gong ◽  
...  

This paper reports the high-temperature characteristics of a laterally vibrating piezoelectric lithium niobate (LiNbO3; LN) MEMS resonator array up to 500 °C in air. After a high-temperature burn-in treatment, device quality factor (Q) was enhanced to 508 and the resonance shifted to a lower frequency and remained stable up to 500 °C. During subsequent in situ high-temperature testing, the resonant frequencies of two coupled shear horizontal (SH0) modes in the array were 87.36 MHz and 87.21 MHz at 25 °C and 84.56 MHz and 84.39 MHz at 500 °C, correspondingly, representing a −3% shift in frequency over the temperature range. Upon cooling to room temperature, the resonant frequency returned to 87.36 MHz, demonstrating the recoverability of device performance. The first- and second-order temperature coefficient of frequency (TCF) were found to be −95.27 ppm/°C and 57.5 ppb/°C2 for resonant mode A, and −95.43 ppm/°C and 55.8 ppb/°C2 for resonant mode B, respectively. The temperature-dependent quality factor and electromechanical coupling coefficient (kt2) were extracted and are reported. Device Q decreased to 334 and total kt2 increased to 12.40% after high-temperature exposure. This work supports the use of piezoelectric LN as a material platform for harsh environment radio-frequency (RF) resonant sensors (e.g., temperature and infrared) incorporated with high coupling acoustic readout.


2020 ◽  
pp. 108128652095489
Author(s):  
RM Zhang ◽  
SS Zhou ◽  
AQ Li

This paper reports an investigation of the influences of surface effects and residual stress on the quality factor of a circular microdiaphragm in contact with liquids on one side. Acoustic radiation, as the main source of energy dissipation, can decrease the quality factor of a circular microdiaphragm. An approximate solution for the natural frequency can be obtained based on the Rayleigh–Ritz energy method. The results show that the influence of surface effects on the quality factor is obvious, in particular for thinner microdiaphragms. A stiffened surface decreases the quality factor, while a softened surface increases it. Furthermore, the quality factor increases with increases in the normalized tension parameter k for both stiffened and softened surfaces. If k is greater than 30, the influence of the surface effects on the quality factor must be considered. The results can provide effective guidance for the determination of dimensions and selection of material parameters in designing microdiaphragm resonant sensors.


Author(s):  
Najib Kacem ◽  
Sébastien Baguet ◽  
Sébastien Hentz ◽  
Régis Dufour

In order to compensate for the loss of performance when scaling resonant sensors down to NEMS, a complete analytical model, including all main sources of nonlinearities, is presented as a predictive tool for the dynamic behavior of clamped-clamped nanoresonators electrostatically actuated. The nonlinear dynamics of such NEMS under superharmonic resonance of an order half their fundamental natural frequencies is investigated. It is shown that the critical amplitude has the same dependence on the quality factor Q and the thickness h as the case of the primary resonance. Finally, a way to retard the pull-in by decreasing the AC voltage is proposed in order to enhance the performance of NEMS resonators.


2022 ◽  
Vol 12 (1) ◽  
Author(s):  
Naoki Inomata ◽  
Yuka Tonsho ◽  
Takahito Ono

AbstractThe quality factor (Q-factor) is an important parameter for mechanical resonant sensors, and the optimal values depend on its application. Therefore, Q-factor control is essential for microelectromechanical systems (MEMS). Conventional methods have some restrictions, such as additional and complicated equipment or nanoscale dimensions; thus, structural methods are one of the reasonable solutions for simplifying the system. In this study, we demonstrate Q-factor control using a variable phononic bandgap by changing the length of the periodic microstructure. For this, silicon microstructure is used because it has both periodicity and a spring structure. The bandgap change is experimentally confirmed by measuring the Q-factors of mechanical resonators with different resonant frequencies. The bandgap range varies depending on the extended structure length, followed by a change in the Q-factor value. In addition, the effects of the periodic structure on the Q-factor enhancement and the influence of stress on the structural length were evaluated. Although microstructures can improve the Q-factors irrespective of periodicity; the result of the periodic microstructure is found to be efficient. The proposed method is feasible as the novel Q-factor control technique has good compatibility with conventional MEMS.


2020 ◽  
Vol 90 (3) ◽  
pp. 30502
Author(s):  
Alessandro Fantoni ◽  
João Costa ◽  
Paulo Lourenço ◽  
Manuela Vieira

Amorphous silicon PECVD photonic integrated devices are promising candidates for low cost sensing applications. This manuscript reports a simulation analysis about the impact on the overall efficiency caused by the lithography imperfections in the deposition process. The tolerance to the fabrication defects of a photonic sensor based on surface plasmonic resonance is analysed. The simulations are performed with FDTD and BPM algorithms. The device is a plasmonic interferometer composed by an a-Si:H waveguide covered by a thin gold layer. The sensing analysis is performed by equally splitting the input light into two arms, allowing the sensor to be calibrated by its reference arm. Two different 1 × 2 power splitter configurations are presented: a directional coupler and a multimode interference splitter. The waveguide sidewall roughness is considered as the major negative effect caused by deposition imperfections. The simulation results show that plasmonic effects can be excited in the interferometric waveguide structure, allowing a sensing device with enough sensitivity to support the functioning of a bio sensor for high throughput screening. In addition, the good tolerance to the waveguide wall roughness, points out the PECVD deposition technique as reliable method for the overall sensor system to be produced in a low-cost system. The large area deposition of photonics structures, allowed by the PECVD method, can be explored to design a multiplexed system for analysis of multiple biomarkers to further increase the tolerance to fabrication defects.


1988 ◽  
Vol 49 (C8) ◽  
pp. C8-1947-C8-1948
Author(s):  
J. Miltat ◽  
P. Trouilloud

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