Fabrication of three-dimensional micro-structures: Microtransfer molding

1996 ◽  
Vol 8 (10) ◽  
pp. 837-840 ◽  
Author(s):  
Xiao-Mei Zhao ◽  
Younan Xia ◽  
George M. Whitesides
Keyword(s):  
Three Dimensional ◽  
Micro Structures ◽  
Microtransfer Molding

Solid and Hollow Micro and Nano Spherical Structures: in Polysilicon and Phosphosilicate Glass

1994 ◽  
Vol 372 ◽  
Author(s):  
M. M. Farooqui ◽  
A. G. R. Evans
Keyword(s):  
Ion Beam ◽  
Three Dimensional ◽  
Optical Components ◽  
Circular Symmetry ◽  
Spherical Structures ◽  
Phosphosilicate Glass ◽  
Micro Systems ◽  
Micro Structures ◽  
Microfabrication Techniques

Fabrication of three dimensional micro structures in silicon and silicon related materials is becoming increasingly important for the realisation of micro systems comprising of sensors, actuators, transducers and analytical assemblies. Fabrication of such devices so far has been mostly in form of structures defined by the crystal planes of silicon, or has involved sophisticated technologies such as ion beam machining, replication using LIGA, or micromachining techniques involving a sequence of alignment and etch stages using binary masks. Structures with circular symmetry are of great interest as micro optical components amongst others, and these are not easily amenable to microfabrication techniques commonly employed.

scholarly journals Modelling Polycrystalline Materials: An Overview of Three-Dimensional Grain-Scale Mechanical Models

2013 ◽  
Vol 05 (01) ◽  
pp. 1350002 ◽  
Author(s):  
I. Benedetti ◽  
F. Barbe
Keyword(s):  
Three Dimensional ◽  
Constitutive Modelling ◽  
Polycrystalline Materials ◽  
High Fidelity ◽  
Computational Capability ◽  
Mechanical Models ◽  
Three Dimensional Models ◽  
The Individual ◽  
Individual Grains ◽  
Micro Structures

A survey of recent contributions on three-dimensional grain-scale mechanical modelling of polycrystalline materials is given in this work. The analysis of material micro-structures requires the generation of reliable micro-morphologies and affordable computational meshes as well as the description of the mechanical behavior of the elementary constituents and their interactions. The polycrystalline microstructure is characterized by the topology, morphology and crystallographic orientations of the individual grains and by the grain interfaces and microstructural defects, within the bulk grains and at the inter-granular interfaces. Their analysis has been until recently restricted to two-dimensional cases, due to high computational requirements. In the last decade, however, the wider affordability of increased computational capability has promoted the development of fully three-dimensional models. In this work, different aspects involved in the grain-scale analysis of polycrystalline materials are considered. Different techniques for generating artificial micro-structures, ranging from highly idealized to experimentally based high-fidelity representations, are briefly reviewed. Structured and unstructured meshes are discussed. The main strategies for constitutive modelling of individual bulk grains and inter-granular interfaces are introduced. Some attention has also been devoted to three-dimensional multiscale approaches and some established and emerging applications have been discussed.

Micro-Patterning of Silicon by Frictional Interaction and Chemical Reaction

1998 ◽  
Vol 120 (2) ◽  
pp. 353-357 ◽  
Author(s):  
Dae-Eun Kim ◽  
Jae-Joon Yi
Keyword(s):  
Chemical Reaction ◽  
Low Cost ◽  
Three Dimensional ◽  
Single Crystal Silicon ◽  
Crystal Silicon ◽  
Micro Electro Mechanical Systems ◽  
Micro Patterning ◽  
Frictional Interaction ◽  
Micro Structures ◽  
Micro Patterns

In this paper a novel and economical method of generating three-dimensional micro-patterns on single crystal silicon without the need for a mask is presented. The technique is based on the fundamental understanding of frictional interaction at light loads. Micro-patterning is done through a two-step process that comprises mechanical scribing and chemical etching. The basic idea is to induce micro-plastic deformation along a prescribed track through frictional interaction between the tool and the workpiece. Then, by exposing the surface to a chemical under controlled conditions, preferential chemical reaction is induced along the track to form hillocks about 5 μm wide and 1 μm high. This method of micro-machining may be used for making patterns in micro-electro-mechanical systems (MEMS) at low cost. Furthermore, this process demonstrates how microtribological processes can be utilized in the fabrication of micro-structures.

A Visualization Study of Abrasive Flow Variation in Abrasive Air Jets

2013 ◽  
Vol 652-654 ◽  
pp. 2123-2128
Author(s):  
Jing Ming Fan ◽  
Jun Wang
Keyword(s):  
Flow Rate ◽  
Three Dimensional ◽  
Processing Technique ◽  
Air Pressure ◽  
Image Processing Technique ◽  
Rate Variation ◽  
Efficient Technology ◽  
Air Jets ◽  
Abrasive Jet Machining ◽  
Micro Structures

Abrasive jet machining is an efficient technology for the fabrication of three dimensional micro structures on brittle materials. In abrasive jet machining, the variation or fluctuation in the amount of abrasive supply has a significant effect on the quality of the machined structures. An image processing technique is employed in this study to study the abrasive flow rate variation, in which abrasive jet pictures are captured at different moments by a Particle Image Velocimetry technology and then processed using Labview Vision Assistant and MATLAB. It shows that the abrasive flow rate fluctuates with time under the jetting conditions considered. The abrasive flow from larger nozzles or at smaller air pressures shows more profound fluctuation. Although the abrasive flow fluctuation from smaller nozzles remains almost constant when the air pressure is changed, for larger nozzles, the magnitude of the fluctuation gradually decreases as the air pressure is increased.

Three-dimensional integration of heterogeneous silicon micro-structures by liftoff and stamping transfer

2007 ◽  
Vol 17 (9) ◽  
pp. 1818-1827 ◽  
Author(s):  
Hiroaki Onoe ◽  
Eiji Iwase ◽  
Kiyoshi Matsumoto ◽  
Isao Shimoyama
Keyword(s):  
Three Dimensional ◽  
Micro Structures

scholarly journals Alleviating Distortion and Improving the Young’s Modulus in Two-Photon Polymerization Fabrications

Micromachines ◽  
2018 ◽  
Vol 9 (12) ◽  
pp. 615 ◽  
Author(s):  
Chow-Shing Shin ◽  
Tzu-Jui Li ◽  
Chih-Lang Lin
Keyword(s):  
Young’S Modulus ◽  
Structural Integrity ◽  
Young's Modulus ◽  
Three Dimensional ◽  
Three Dimensional Printing ◽  
Two Photon ◽  
Laser Focus ◽  
Micro Cantilever ◽  
Micro Structures ◽  
Two Photon Polymerization

Two-photon polymerization enables the extremely high resolution three-dimensional printing of micro-structures. To know the mechanical properties, and better still, to be able to adjust them is of paramount importance to ensuring the proper structural integrity of the printed products. In this work, the Young’s modulus is measured on two-photon polymerized micro-cantilever bars. Optimizing the scanning trajectory of the laser focus points is important in alleviating distortion of the printed bars. By increasing the laser power and decreasing the inter-voxel distances we can double the Young’s modulus. Post-curing with ultraviolet light can approximately quadruple the Young’s modulus. However, the resulting modulus is still only about 0.3% of that of the bulk polymerized material.

FEM-Based Analysis of Micro-Structure Parameters for Roll Forming on Aluminum Alloy Sheet

2013 ◽  
Vol 762 ◽  
pp. 763-768
Author(s):  
Zhi Qing Hu ◽  
Ji Zhao ◽  
Zeng Ming Feng
Keyword(s):  
Three Dimensional ◽  
Alloy Sheet ◽  
Roll Forming ◽  
Micro Structure ◽  
Structured Surfaces ◽  
Micro Patterning ◽  
Dimensional Finite Element ◽  
Marine Applications ◽  
Three Dimensional Finite Element ◽  
Micro Structures

Micro-structured surfaces with drag reduction, desorption, and excellent optical performance are widely used in the field of automotive, aerospace, marine applications. Therefore, the manufacturing of the micro-structure on the metal surface is of high impotance. Although the processing methods for micro-patterning of surfaces have progressed in recent years, micro-structure processing is still not used on large metal surfaces. In this paper, a method of roll forming micro-structure on the plate surface is proposed. A simulation model for micro-structure roll forming (MRF) was presented by using three-dimensional finite element method (FEM). The strain and stress, and the displacements caused by micro-structure were analyzed. The results provide theoretical guidance for the design of different micro-structures and the sequence of their processing.

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