PZT Driven Micro XY Stage

Next-Generation Actuators Leading Breakthroughs ◽

10.1007/978-1-84882-991-6_6 ◽

2010 ◽

pp. 55-66

Author(s):

Takahito Ono ◽

Mohd Faizul Mohd Sabri ◽

Masayoshi Esashi

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