Modeling of a Piezoelectric Based Nanopositioning Stage

Multibody Mechatronic Systems - Mechanisms and Machine Science ◽

10.1007/978-3-030-60372-4_29 ◽

2020 ◽

pp. 257-264

Author(s):

Fernando Villegas ◽

Alejandro Masante ◽

Rogelio Hecker ◽

Gustavo Flores

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