From Simulation to Manufacturing of Piezoelectric Micromachined AlN Membrane

Advances in Intelligent Systems and Computing - Mechatronics 2017 ◽

10.1007/978-3-319-65960-2_86 ◽

2017 ◽

pp. 699-707 ◽

Author(s):

Magdalena A. Ekwińska ◽

Jerzy Zając ◽

Michał Zaborowski ◽

Dariusz Szmigiel

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