Integration of SiLK Semiconductor Dielectric

Springer Series in Advanced Microelectronics - Low Dielectric Constant Materials for IC Applications ◽

10.1007/978-3-642-55908-2_10 ◽

2003 ◽

pp. 277-304 ◽

Cited By ~ 1

Author(s):

Joost J. Waeterloos

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