Electrostatics in MEMS and NEMS

ICASE/LaRC Interdisciplinary Series in Science and Engineering - Micromechanics and Nanoscale Effects ◽

10.1007/978-94-007-1013-9_3 ◽

2004 ◽

pp. 59-80 ◽

Cited By ~ 1

Author(s):

John A. Pelesko

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