On the Composition of the Sputtered Flux from Metal Targets and their Compounds

Erosion and Growth of Solids Stimulated by Atom and Ion Beams ◽

10.1007/978-94-009-4422-0_5 ◽

1986 ◽

pp. 98-102

Author(s):

G. Betz ◽

W. Husinsky

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