Micro/Nanoscale Tribology of Mems Materials, Lubricants and Devices

Fundamentals of Tribology and Bridging the Gap Between the Macro- and Micro/Nanoscales ◽

10.1007/978-94-010-0736-8_60 ◽

2001 ◽

pp. 821-850 ◽

Author(s):

S. Sundararajan ◽

B. Bhushan

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