Micromachining of Piezoelectric Microsensors and Microactuators for Robotics Applications

Solid Mechanics and Its Applications - Precision Sensors, Actuators and Systems ◽

10.1007/978-94-011-1818-7_5 ◽

1992 ◽

pp. 139-174 ◽

Author(s):

Dennis L. Polla

Download Full-text