Micromachining of Piezoelectric Microsensors and Microactuators for Robotics Applications

Solid Mechanics and Its Applications - Precision Sensors, Actuators and Systems ◽

10.1007/978-94-011-1818-7_5 ◽

1992 ◽

pp. 139-174 ◽

Cited By ~ 5

Author(s):

Dennis L. Polla

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