A novel fabrication method of Si mesoscopic structures on Al2O3 by selective epitaxial growth using electron beam irradiation

1996 ◽  
Vol 227 (1-4) ◽  
pp. 326-329 ◽  
Author(s):  
Shun-ichi Yanagiya ◽  
Hiroyuki Wado ◽  
Mamoru Yoshimoto ◽  
Makoto Ishida
Keyword(s):  
Electron Beam ◽  
Epitaxial Growth ◽  
Electron Beam Irradiation ◽  
Fabrication Method ◽  
Beam Irradiation ◽  
Selective Epitaxial Growth

Properties and Mechanism of Si Selective Epitaxial Growth on Al2O3using Electron Beam Irradiation

1993 ◽  
Vol 32 (Part 1, No. 6A) ◽  
pp. 2582-2586 ◽  
Author(s):  
Makoto Ishida ◽  
Takashi Tomita ◽  
Masahiko Fujita ◽  
Tetsuro Nakamura
Keyword(s):  
Electron Beam ◽  
Epitaxial Growth ◽  
Electron Beam Irradiation ◽  
Beam Irradiation ◽  
Selective Epitaxial Growth

Selective epitaxial growth of Si on sapphire using electron beam irradiation

1989 ◽  
Vol 55 (16) ◽  
pp. 1636-1638 ◽  
Author(s):  
Kazuaki Sawada ◽  
Makoto Ishida ◽  
Tetsuro Nakamura ◽  
Tetso Suzaki
Keyword(s):  
Electron Beam ◽  
Epitaxial Growth ◽  
Electron Beam Irradiation ◽  
Beam Irradiation ◽  
Selective Epitaxial Growth

Methods to Monitor and Improve the Performance of Specimen Holders for Transmission Electron Cryomicroscopy

1996 ◽  
Vol 54 ◽  
pp. 454-455
Author(s):  
B. L. Armbruster ◽  
B. Kraus ◽  
M. Pan
Keyword(s):  
Electron Microscopy ◽  
Electron Beam ◽  
Electron Beam Irradiation ◽  
Beam Irradiation ◽  
Quality Of Data ◽  
Electron Cryomicroscopy ◽  
Thermal Equilibration ◽  
Transmission Electron ◽  
Electron Microscopes

One goal in electron microscopy of biological specimens is to improve the quality of data to equal the resolution capabilities of modem transmission electron microscopes. Radiation damage and beam- induced movement caused by charging of the sample, low image contrast at high resolution, and sensitivity to external vibration and drift in side entry specimen holders limit the effective resolution one can achieve. Several methods have been developed to address these limitations: cryomethods are widely employed to preserve and stabilize specimens against some of the adverse effects of the vacuum and electron beam irradiation, spot-scan imaging reduces charging and associated beam-induced movement, and energy-filtered imaging removes the “fog” caused by inelastic scattering of electrons which is particularly pronounced in thick specimens.Although most cryoholders can easily achieve a 3.4Å resolution specification, information perpendicular to the goniometer axis may be degraded due to vibration. Absolute drift after mechanical and thermal equilibration as well as drift after movement of a holder may cause loss of resolution in any direction.

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