Advances of nitrogen microwave plasma for optical emission spectrometry and applications in elemental analysis: a review

2020 ◽  
Vol 35 (10) ◽  
pp. 2113-2131 ◽  
Author(s):  
Alexandre Müller ◽  
Dirce Pozebon ◽  
Valderi L. Dressler
Keyword(s):  
Elemental Analysis ◽  
Microwave Plasma ◽  
Optical Emission ◽  
Optical Emission Spectrometry ◽  
Emission Spectrometry ◽  
Microwave Induced Plasma ◽  
Plasma Optical Emission Spectrometry ◽  
Mip Oes

The N2-sustained microwave-induced plasma optical emission spectrometry (N2-MIP OES) has been increasingly applied for metals and non-metals determination in different fields.

scholarly journals Langmuir Probe Diagnostics with Optical Emission Spectrometry (OES) for Coaxial Line Microwave Plasma

2020 ◽  
Vol 10 (22) ◽  
pp. 8117
Author(s):  
Chi Chen ◽  
Wenjie Fu ◽  
Chaoyang Zhang ◽  
Dun Lu ◽  
Meng Han ◽  
...  
Keyword(s):  
Electron Temperature ◽  
Langmuir Probe ◽  
Microwave Plasma ◽  
Optical Emission ◽  
Coaxial Line ◽  
Plasma Source ◽  
Optical Emission Spectrometry ◽  
Emission Spectrometry ◽  
Plasma Parameters ◽  
Current Voltage

The Langmuir probe is a feasible method to measure plasma parameters. However, as the reaction progresses in the discharged plasma, the contamination would be attached to the probe surface and lead to a higher incorrect electron temperature. Then, the electron density cannot be obtained. This paper reports a simple approach to combining the Langmuir probe and the optical emission spectrometry (OES), which can be used to obtain the electron temperature to solve this problem. Even the Langmuir probe is contaminative, the probe current–voltage (I–V) curve with the OES spectra also gives the approximate electron temperature and density. A homemade coaxial line microwave plasma source driven by a 2.45 GHz magnetron was adopted to verify this mothed, and the electron temperature and density in different pressure (40–80 Pa) and microwave power (400–800 W) were measured to verify that it is feasible.

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