Absolute density measurement of hydrogen atom in inductively coupled Ar/H2 plasmas using vacuum ultraviolet absorption spectroscopy

Current Applied Physics ◽

10.1016/j.cap.2020.02.001 ◽

2020 ◽

Vol 20 (4) ◽

pp. 550-556 ◽

Author(s):

Deog Gyun Cho ◽

Jonggu Han ◽

Duksun Han ◽

Se Youn Moon

Keyword(s):

Hydrogen Atom ◽

Absorption Spectroscopy ◽

Vacuum Ultraviolet ◽

Density Measurement ◽

Ultraviolet Absorption ◽

Inductively Coupled ◽

Absolute Density ◽

Ultraviolet Absorption Spectroscopy

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Vacuum ultraviolet absorption spectroscopy for absolute density measurements of fluorine atoms in fluorocarbon plasmas

Applied Physics Letters ◽

10.1063/1.118582 ◽

1997 ◽

Vol 70 (11) ◽

pp. 1375-1377 ◽

Author(s):

K. Sasaki ◽

Y. Kawai ◽

K. Kadota

Keyword(s):

Absorption Spectroscopy ◽

Vacuum Ultraviolet ◽

Ultraviolet Absorption ◽

Density Measurements ◽

Fluorocarbon Plasmas ◽

Absolute Density ◽

Ultraviolet Absorption Spectroscopy

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Vacuum ultraviolet absorption spectroscopy employing a microdiacharge hollow-cathode lamp for absolute density measurements of hydrogen atoms in reactive plasmas

Applied Physics Letters ◽

10.1063/1.125497 ◽

1999 ◽

Vol 75 (25) ◽

pp. 3929-3931 ◽

Author(s):

Seigou Takashima ◽

Masaru Hori ◽

Toshio Goto ◽

Akihiro Kono ◽

Masafumi Ito ◽

...

Keyword(s):

Absorption Spectroscopy ◽

Hollow Cathode ◽

Vacuum Ultraviolet ◽

Ultraviolet Absorption ◽

Hydrogen Atoms ◽

Density Measurements ◽

Hollow Cathode Lamp ◽

Absolute Density ◽

Ultraviolet Absorption Spectroscopy

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Formation and Diagnostics of Plasmas and Radicals. Measurement of Absolute Density of Atomic Species Using Vacuum Ultraviolet Absorption Spectroscopy with Microdischage Lamp.

Shinku ◽

10.3131/jvsj.44.802 ◽

2001 ◽

Vol 44 (9) ◽

pp. 802-807

Author(s):

Seigou TAKASHIMA ◽

Masaru HORI ◽

Toshio GOTO

Keyword(s):

Absorption Spectroscopy ◽

Vacuum Ultraviolet ◽

Ultraviolet Absorption ◽

Absolute Density ◽

Ultraviolet Absorption Spectroscopy ◽

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Development of vacuum ultraviolet absorption spectroscopy technique employing nitrogen molecule microdischarge hollow cathode lamp for absolute density measurements of nitrogen atoms in process plasmas

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1340655 ◽

2001 ◽

Vol 19 (2) ◽

pp. 599-602 ◽

Author(s):

Seigou Takashima ◽

Shigeo Arai ◽

Masaru Hori ◽

Toshio Goto ◽

Akihiro Kono ◽

...

Keyword(s):

Absorption Spectroscopy ◽

Hollow Cathode ◽

Vacuum Ultraviolet ◽

Nitrogen Molecule ◽

Ultraviolet Absorption ◽

Spectroscopy Technique ◽

Density Measurements ◽

Hollow Cathode Lamp ◽

Absolute Density ◽

Ultraviolet Absorption Spectroscopy

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Self-absorption-calibrated vacuum ultraviolet absorption spectroscopy for absolute oxygen atomic density measurement

Plasma Sources Science and Technology ◽

10.1088/0963-0252/24/5/055019 ◽

2015 ◽

Vol 24 (5) ◽

pp. 055019 ◽

Author(s):

Xiaoli Yang ◽

Koichi Sasaki ◽

Masaaki Nagatsu

Keyword(s):

Absorption Spectroscopy ◽

Vacuum Ultraviolet ◽

Density Measurement ◽

Ultraviolet Absorption ◽

Atomic Density ◽

Ultraviolet Absorption Spectroscopy

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Development of vacuum ultraviolet absorption spectroscopy system for wide measurement range of number density using a dual-tube inductively coupled plasma light source

Review of Scientific Instruments ◽

10.1063/1.4770118 ◽

2012 ◽

Vol 83 (12) ◽

pp. 123105 ◽

Author(s):

Akira Kuwahara ◽

Makoto Matsui ◽

Yoshiki Yamagiwa

Keyword(s):

Light Source ◽

Absorption Spectroscopy ◽

Inductively Coupled Plasma ◽

Vacuum Ultraviolet ◽

Measurement Range ◽

Ultraviolet Absorption ◽

Number Density ◽

Inductively Coupled ◽

Ultraviolet Absorption Spectroscopy ◽

Spectroscopy System

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Predissociation supported high‐resolution vacuum ultraviolet absorption spectroscopy of excited electronic states of NH3

The Journal of Chemical Physics ◽

10.1063/1.467341 ◽

1994 ◽

Vol 101 (7) ◽

pp. 5523-5528 ◽

Author(s):

Xinghua Li ◽

Carl Rudolf Vidal

Keyword(s):

High Resolution ◽

Absorption Spectroscopy ◽

Vacuum Ultraviolet ◽

Electronic States ◽

Ultraviolet Absorption ◽

Excited Electronic States ◽

Ultraviolet Absorption Spectroscopy

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ChemInform Abstract: Predissociation Supported High-Resolution Vacuum Ultraviolet Absorption Spectroscopy of Excited Electronic States of NH3.

10.1002/chin.199503006 ◽

2010 ◽

Vol 26 (3) ◽

pp. no-no

Author(s):

X. LI ◽

C. R. VIDAL

Keyword(s):

High Resolution ◽

Absorption Spectroscopy ◽

Vacuum Ultraviolet ◽

Electronic States ◽

Ultraviolet Absorption ◽

Excited Electronic States ◽

Ultraviolet Absorption Spectroscopy

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Measurement of oxygen atom density employing vacuum ultraviolet absorption spectroscopy with microdischarge hollow cathode lamp

Review of Scientific Instruments ◽

10.1063/1.1582386 ◽

2003 ◽

Vol 74 (7) ◽

pp. 3453-3459 ◽

Author(s):

Hisao Nagai ◽

Mineo Hiramatsu ◽

Masaru Hori ◽

Toshio Goto

Keyword(s):

Oxygen Atom ◽

Absorption Spectroscopy ◽

Hollow Cathode ◽

Vacuum Ultraviolet ◽

Ultraviolet Absorption ◽

Atom Density ◽

Hollow Cathode Lamp ◽

Ultraviolet Absorption Spectroscopy

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PH3Concentration Measurements by Vacuum Ultraviolet Absorption Spectroscopy

Japanese Journal of Applied Physics ◽

10.1143/jjap.19.779 ◽

1980 ◽

Vol 19 (4) ◽

pp. 779-780 ◽

Author(s):

Noriaki Honma ◽

Isao Sugaya ◽

Katsumi Takami

Keyword(s):

Absorption Spectroscopy ◽

Vacuum Ultraviolet ◽

Ultraviolet Absorption ◽

Ultraviolet Absorption Spectroscopy

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