Two-step femtosecond laser etching for bulk micromachining of 4H–SiC membrane applied in pressure sensing

Silicon carbide (SiC) has promising potential for pressure sensing in a high temperature and harsh environment due to its outstanding material properties. In this work, a 4H-SiC piezoresistive pressure chip fabricated based on femtosecond laser technology was proposed. A 1030 nm, 200 fs Yb: KGW laser with laser average powers of 1.5, 3 and 5 W was used to drill blind micro holes for achieving circular sensor diaphragms. An accurate per lap feed of 16.2 μm was obtained under laser average power of 1.5 W. After serialized laser processing, the machining depth error of no more than 2% and the surface roughness as low as 153 nm of the blind hole were measured. The homoepitaxial piezoresistors with a doping concentration of 1019 cm−3 were connected by a closed-loop Wheatstone bridge after a rapid thermal annealing process, with a specific contact resistivity of 9.7 × 10−5 Ω cm2. Our research paved the way for the integration of femtosecond laser micromachining and SiC pressure sensor chips manufacturing.

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Femtosecond Laser Etching of GaN and InGaN Thin Films Grown by Metal Organic Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.7567/jjap.52.08jk08 ◽

2013 ◽

Vol 52 (8S) ◽

pp. 08JK08 ◽

Cited By ~ 3

Author(s):

Mindaugas Ščiuka ◽

Tomas Grinys ◽

Mantas Dmukauskas ◽

Viktorija Plerpaitė ◽

Andrius Melninkaitis

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Femtosecond Laser ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Laser Etching ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Femtosecond laser etching of protein crystal to process and to isolate the single crystal

Acta Crystallographica Section A Foundations of Crystallography ◽

10.1107/s0108767308099169 ◽

2008 ◽

Vol 64 (a1) ◽

pp. C27-C27

Author(s):

Y. Hosokawa ◽

M. Kashii ◽

H.Y. Yoshikawa ◽

H. Adachi ◽

Y. Mori ◽

...

Keyword(s):

Femtosecond Laser ◽

Single Crystal ◽

Protein Crystal ◽

Laser Etching

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Nanosecond laser-induced breakdown assisted by femtosecond laser pre-ionization in air: the effect on spatial resolution and continuous radiation

The European Physical Journal Applied Physics ◽

10.1051/epjap/2020200258 ◽

2020 ◽

Vol 92 (2) ◽

pp. 20701

Author(s):

Bo Li ◽

Xiaofeng Li ◽

Zhifeng Zhu ◽

Qiang Gao

Keyword(s):

Femtosecond Laser ◽

Spatial Resolution ◽

Laser Induced Breakdown Spectroscopy ◽

Nanosecond Laser ◽

Breakdown Threshold ◽

Powerful Technique ◽

Breakdown Spectroscopy ◽

Continuous Radiation ◽

Laser Induced Breakdown

Laser-induced breakdown spectroscopy (LIBS) is a powerful technique for quantitative diagnostics of gases. The spatial resolution of LIBS, however, is limited by the volume of plasma. Here femtosecond-nanosecond dual-pulsed LIBS was demonstrated. Using this method, the breakdown threshold was reduced by 80%, and decay of continuous radiation was shortened. In addition, the volume of the plasma was shrunk by 85% and hence, the spatial resolution of LIBS was significantly improved.

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