Fabrication of 4H–SiC microvias using a femtosecond laser assisted by a protective layer

2022 ◽  
Vol 123 ◽  
pp. 111695
Author(s):  
Bin Liu ◽  
Panpan Fan ◽  
Hongwei Song ◽  
Kai Liao ◽  
Wenjun Wang
2007 ◽  
Vol 253 (7) ◽  
pp. 3450-3454 ◽  
Author(s):  
Lei Yuan ◽  
Yuanan Zhao ◽  
Congjuan Wang ◽  
Hongbo He ◽  
Zhengxiu Fan ◽  
...  

2021 ◽  
Vol 27 ◽  
pp. 26-30
Author(s):  
Yuxin Li ◽  
Zhencheng Ren ◽  
Xiao Jia ◽  
Wenjing Yang ◽  
Naas Nassreddin ◽  
...  

Author(s):  
N. Mori ◽  
T. Oikawa ◽  
Y. Harada ◽  
J. Miyahara ◽  
T. Matsuo

The Imaging Plate (IP) is a new type imaging device, which was developed for diagnostic x ray imaging. We have reported that usage of the IP for a TEM has many merits; those are high sensitivity, wide dynamic range, and good linearity. However in the previous report the reading system was prototype drum-type-scanner, and IP was also experimentally made, which phosphor layer was 50μm thick with no protective layer. So special care was needed to handle them, and they were used only to make sure the basic characteristics. In this article we report the result of newly developed reading, printing system and high resolution IP for practical use. We mainly discuss the characteristics of the IP here. (Precise performance concerned with the reader and other system are reported in the other article.)Fig.1 shows the schematic cross section of the IP. The IP consists of three parts; protective layer, phosphor layer and support.


2020 ◽  
Vol 92 (2) ◽  
pp. 20701
Author(s):  
Bo Li ◽  
Xiaofeng Li ◽  
Zhifeng Zhu ◽  
Qiang Gao

Laser-induced breakdown spectroscopy (LIBS) is a powerful technique for quantitative diagnostics of gases. The spatial resolution of LIBS, however, is limited by the volume of plasma. Here femtosecond-nanosecond dual-pulsed LIBS was demonstrated. Using this method, the breakdown threshold was reduced by 80%, and decay of continuous radiation was shortened. In addition, the volume of the plasma was shrunk by 85% and hence, the spatial resolution of LIBS was significantly improved.


2006 ◽  
Vol 36 (2) ◽  
pp. 111-117 ◽  
Author(s):  
G. Bingang ◽  
L. Chunliang ◽  
S. Zhongxiao ◽  
L. Liu ◽  
F. Yufeng ◽  
...  

2006 ◽  
Vol 223 (S 1) ◽  
Author(s):  
MP Holzer ◽  
TM Rabsilber ◽  
GU Auffarth

2003 ◽  
Vol 780 ◽  
Author(s):  
R. Houbertz ◽  
J. Schulz ◽  
L. Fröhlich ◽  
G. Domann ◽  
M. Popall ◽  
...  

AbstractReal 3-D sub-νm lithography was performed with two-photon polymerization (2PP) using inorganic-organic hybrid polymer (ORMOCER®) resins. The hybrid polymers were synthesized by hydrolysis/polycondensation reactions (modified sol-gel synthesis) which allows one to tailor their material properties towards the respective applications, i.e., dielectrics, optics or passivation. Due to their photosensitive organic functionalities, ORMOCER®s can be patterned by conventional photo-lithography as well as by femtosecond laser pulses at 780 nm. This results in polymerized (solid) structures where the non-polymerized parts can be removed by conventional developers.ORMOCER® structures as small as 200 nm or even below were generated by 2PP of the resins using femtosecond laser pulses. It is demonstrated that ORMOCER®s have the potential to be used in components or devices built up by nm-scale structures such as, e.g., photonic crystals. Aspects of the materials in conjunction to the applied technology are discussed.


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