A batch fabrication-compatible multifunctional thermal sensor based on thin film thermocouple and thermopile elements

2018 ◽  
Vol 280 ◽  
pp. 188-196 ◽  
Author(s):  
Nishan Khatri ◽  
Tithi Desai ◽  
Amit Rai ◽  
Pratik KC ◽  
Arden L. Moore
Keyword(s):  
Thin Film ◽  
Thermal Sensor ◽  
Batch Fabrication ◽  
Thin Film Thermocouple

A New Scanning Thermal Microprobe

1997 ◽  
Vol 503 ◽  
Author(s):  
Yongxia Zhang ◽  
Yanwei Zhang ◽  
Juliana Blaser ◽  
T. S. Sriiram ◽  
R. B. Marcus
Keyword(s):  
Thin Film ◽  
High Resolution ◽  
Thermal Response ◽  
Temperature Sensing ◽  
Thermal Sensor ◽  
Atomic Force ◽  
Thin Film Thermocouple ◽  
Processing Steps ◽  
Thermocouple Junction

ABSTRACTA thermal microprobe has been designed and built for high resolution temperature sensing. The thermal sensor is a thin-film thermocouple junction at the tip of an Atomic Force Microprobe (AFM) silicon probe needle. Only wafer-stage processing steps are used for the fabrication. The thermal response over the range 25–s 4.5–rovolts per degree C and is linear.

Thin film thermocouple sensors for measurement of contact temperatures during slider asperity interaction on magnetic recording disks

1992 ◽  
Vol 28 (5) ◽  
pp. 2548-2550 ◽  
Author(s):  
E. Schreck ◽  
R.E. Fontana ◽  
G.P. Singh
Keyword(s):  
Thin Film ◽  
Magnetic Recording ◽  
Thin Film Thermocouple

Peltier effect in a co-evaporated Sb2Te3(P)-Bi2Te3(N) thin film thermocouple

2002 ◽  
Vol 408 (1-2) ◽  
pp. 270-274 ◽  
Author(s):  
Helin Zou ◽  
D.M. Rowe ◽  
S.G.K. Williams
Keyword(s):  
Thin Film ◽  
Peltier Effect ◽  
Thin Film Thermocouple

Temperature Measurement of Workpieces in Conventional Surface Grinding

1998 ◽  
Vol 122 (2) ◽  
pp. 297-303 ◽  
Author(s):  
T. Kato ◽  
Hiroshi Fujii
Keyword(s):  
Thin Film ◽  
Ground Surface ◽  
Wheel Speed ◽  
Surface Grinding ◽  
Maximum Temperature ◽  
Depth Of Cut ◽  
Thermal Sensor ◽  
Moving Heat Source ◽  
Pvd Film ◽  
Film Method

Temperature at various depths from the ground surface in workpiece is measured accurately by using the newly developed PVD film method, in which a thin film deposited on the workpiece is used as a thermal sensor. The influence of workpiece speed, depth of cut and wheel speed on the temperature of the workpiece was investigated under conventional surface grinding with no grinding fluids. The measured results were compared with Takazawa’s approximation based on Jaeger’s heat conduction solution to the moving heat source problem. The maximum temperature rise at the surface and the temperature gradient close to the surface were obtained and correlated with the residual stress induced at the surface. [S1087-1357(00)70302-9]

Thin-film thermocouple gauge

Vacuum ◽  
1989 ◽  
Vol 39 (5) ◽  
pp. 490
Keyword(s):  
Thin Film ◽  
Thin Film Thermocouple

Preparation of W–Ta thin-film thermocouple on diamond anvil cell for in-situ temperature measurement under high pressure

2011 ◽  
Vol 82 (4) ◽  
pp. 045108 ◽  
Author(s):  
Jie Yang ◽  
Ming Li ◽  
Honglin Zhang ◽  
Chunxiao Gao
Keyword(s):  
Thin Film ◽  
High Pressure ◽  
Temperature Measurement ◽  
Diamond Anvil Cell ◽  
Thin Film Thermocouple ◽  
Diamond Anvil

Characteristics and Application of Thin-Film Thermal Sensor

1972 ◽  
Vol 75 (639) ◽  
pp. 498-506
Author(s):  
Yoshizo OKAMOTO ◽  
Juichi HANAWA ◽  
Hiroshi KAWAMURA
Keyword(s):  
Thin Film ◽  
Thermal Sensor

scholarly journals Preparation and thermal volatility characteristics of In2O3/ITO thin film thermocouple by RF magnetron sputtering

AIP Advances ◽  
2017 ◽  
Vol 7 (11) ◽  
pp. 115025 ◽  
Author(s):  
Yantao Liu ◽  
Wei Ren ◽  
Peng Shi ◽  
Dan Liu ◽  
Ming Liu ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Thin Film Thermocouple

Thermal Sensor Using Poly-Si Thin-Film Transistors With Self-Aligned and Offset Gate Structures

2013 ◽  
Vol 13 (5) ◽  
pp. 1771-1774 ◽  
Author(s):  
Mutsumi Kimura ◽  
Jun Taya ◽  
Akihiro Nakashima ◽  
Yuki Sagawa
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Thermal Sensor ◽  
Si Thin Film
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