scholarly journals Correlation between properties of direct current magnetron sputtered thin niobium nitride films and plasma parameters

2021 ◽  
pp. 139046
Author(s):  
Richard Marquardt ◽  
Julia Cipo ◽  
Felix Schlichting ◽  
Gitanjali Kolhatkar ◽  
Hermann Kohlstedt ◽  
...  
Keyword(s):  
Direct Current ◽  
Niobium Nitride ◽  
Plasma Parameters

A comparative study of plasma parameters and gas phase compositions in Cl2 and HCl direct current glow discharges

2008 ◽  
Vol 516 (10) ◽  
pp. 3020-3027 ◽  
Author(s):  
A.M. Efremov ◽  
V.I. Svettsov ◽  
D.V. Sitanov ◽  
D.I. Balashov
Keyword(s):  
Comparative Study ◽  
Gas Phase ◽  
Direct Current ◽  
Plasma Parameters ◽  
Glow Discharges

scholarly journals Influence of an external circuit on the plasma parameters in the channel of the radio-frequency accelerator with a closed electron drift

2021 ◽  
pp. 24-30
Keyword(s):  
Direct Current ◽  
Plasma Source ◽  
Plasma Potential ◽  
Electron Drift ◽  
Axial Distribution ◽  
Plasma Parameters ◽  
Local Maxima ◽  
First Case ◽  
Temperature Of Electrons ◽  
Closed Electron

The axial distribution of the plasma potential, concentration and temperature of electrons in an RF capacitive plasma source with the geometry of an accelerator with a closed electron drift is experimentally investigated in this work. Two cases of the external electrical discharge circuit are considered. In the first case, the electrodes were closed by direct current, in the second, they were opened. It is shown that direct current closure of the electrodes leads to a significant increase in the plasma potential and electron concentration. In a number of cases, local maxima of temperature and plasma density are observed near the electrodes, which can be associated with the occurrence of azimuthal electron drift in crossed electric and magnetic fields.

scholarly journals Nanoparticles in direct-current discharges: Growth and electrostatic coupling

2014 ◽  
Vol 80 (6) ◽  
pp. 849-854 ◽  
Author(s):  
Kishor Kumar K. ◽  
L. Couëdel ◽  
C. Arnas
Keyword(s):  
Cathode Material ◽  
Direct Current ◽  
Growth Phases ◽  
Plasma Parameters ◽  
Electrostatic Coupling ◽  
And Tungsten

The formation of nanoparticles from the sputtering of graphite and tungsten cathodes in direct-current discharges is investigated. The successive phases of growth present specificities according to the cathode material. The evolution of the discharge and plasma parameters during the growth phases accounts for the nanoparticle-plasma electrostatic coupling. This evolution also presents strong differences as a function of the cathode material. Features characterising each case are discussed.

scholarly journals Influence of an external circuit on the plasma parameters in the channel of the radio-frequency accelerator with a closed electron drift

2021 ◽  
pp. 24-30
Keyword(s):  
Direct Current ◽  
Plasma Source ◽  
Plasma Potential ◽  
Electron Drift ◽  
Axial Distribution ◽  
Plasma Parameters ◽  
Local Maxima ◽  
First Case ◽  
Temperature Of Electrons ◽  
Closed Electron

The axial distribution of the plasma potential, concentration and temperature of electrons in an RF capacitive plasma source with the geometry of an accelerator with a closed electron drift is experimentally investigated in this work. Two cases of the external electrical discharge circuit are considered. In the first case, the electrodes were closed by direct current, in the second, they were opened. It is shown that direct current closure of the electrodes leads to a significant increase in the plasma potential and electron concentration. In a number of cases, local maxima of temperature and plasma density are observed near the electrodes, which can be associated with the occurrence of azimuthal electron drift in crossed electric and magnetic fields.

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