Design of a precise linear-rotary positioning stage for optical focusing based on the stick-slip mechanism
2022 ◽
Vol 165
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pp. 108398
2010 ◽
Vol 46
(6)
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pp. 600-605
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2012 ◽
Vol 2
(2)
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pp. 1-14
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2012 ◽
Vol 337-338
◽
pp. 39-46
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2016 ◽
Vol 21
(4)
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pp. 2165-2173
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2012 ◽
Vol 220-223
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pp. 463-468
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