Comprehensive study of charge-based motion control for piezoelectric nanopositioners: Modeling, instrumentation and controller design
2022 ◽
Vol 166
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pp. 108477
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2005 ◽
Vol 128
(3)
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pp. 592-599
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2011 ◽
Vol 02
(03)
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pp. 251-257
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2013 ◽
Vol 694-697
◽
pp. 1679-1683
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