Characterization of modifications of polymer surfaces after excimer laser treatments below the ablation threshold

2000 ◽  
Vol 154-155 ◽  
pp. 211-216 ◽  
Author(s):  
P Laurens ◽  
M Ould Bouali ◽  
F Meducin ◽  
B Sadras
Keyword(s):  
Excimer Laser ◽  
Ablation Threshold ◽  
Polymer Surfaces ◽  
Laser Treatments

Femtosecond Excimer (248 NM) Laser Micro-Machining of Teflon (PTFE)

2001 ◽  
Author(s):  
K. P. Adhi ◽  
R. L. Owings ◽  
T. A. Railkar ◽  
W. D. Brown ◽  
A. P. Malshe
Keyword(s):  
Excimer Laser ◽  
Photoelectron Spectroscopy ◽  
Laser Processing ◽  
Ablation Threshold ◽  
Micro Machining ◽  
X Ray ◽  
Laser Micro Machining ◽  
Edge Quality ◽  
Micrometer Size

Abstract We have investigated, using X-ray photoelectron spectroscopy (XPS), the surface of polyterafluoroethylene (PTFE) films which were subjected to micromachining by femtosecond UV radiation from an excimer laser (KrF: λ = 248 nm, tp ∼ 380 fs) in air ambient. Bulk characterization of processed PTFE films by Fourier transform infrared spectroscopy (FTIR) allowed us to study laser-induced modifications of the material at energy densities below the ablation threshold. No features in the XPS or FTIR spectra indicated incorporation of hydrogen and/or oxygen or the formation of cross-linked networks of carbon, indicating chemically clean processing in contrast to nanosecond excimer laser processing which chemically degrades the surface being machined. Scanning electron microscopy (SEM) of micrometer size microvias indicates mechanically and thermally damage-free processing of PTFE with good edge quality, again in contrast to nanosecond excimer laser processing.

Precise and Smooth Removal from Polymer Surfaces by VUV Excimer Laser Ablation at 157 nm: PMMA.

1998 ◽  
Vol 544 ◽  
Author(s):  
G. Padeletti ◽  
M. Lapczyna ◽  
M. Stuke
Keyword(s):  
Laser Ablation ◽  
Excimer Laser ◽  
Polymer Surfaces ◽  
Force Microscopy ◽  
Laser Fluences ◽  
Atomic Force ◽  
Power Spectral ◽  
Afm Analysis ◽  
Methyl Metacrylate

AbstractSmooth polymer surfaces can be generated by VUV laser ablation at 157 nm. This has been demonstrated for poly-methyl-metacrylate (PMMA) by atomic force microscopy (AFM) analysis of laser-exposed surfaces. At excimer laser fluences below 30 mJ/cm2 the mean roughness (Ra) remains below 10 nm for both single and 10 shot exposures.A detailed characterization of the surface nano-morphology distribution carried out by the “power spectral density” (PSD) analysis, shows that the surface is smoothened by the VUV laser for lateral scales smaller than 20 μm.

Characterization of GaAs surfaces treated with phosphine gas photodecomposed by an ArF excimer laser

1998 ◽  
Vol 72 (12) ◽  
pp. 1472-1474 ◽  
Author(s):  
Takashi Sugino ◽  
Hideaki Ninomiya ◽  
Junji Shirafuji ◽  
Koichiro Matsuda
Keyword(s):  
Excimer Laser ◽  
Arf Excimer Laser

Characterization of $\bf LiNbO_{3}$ Optical-Waveguide Film Grown on Sapphire by ArF Excimer Laser Ablation

1995 ◽  
Vol 34 (Part 1, No. 11) ◽  
pp. 6084-6091 ◽  
Author(s):  
Masamitsu Haruna ◽  
\ast ◽  
Hideki Ishizuki ◽  
Jun Tsutsumi ◽  
Yusaku Shimaoka ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Optical Waveguide ◽  
Excimer Laser ◽  
Excimer Laser Ablation ◽  
Arf Excimer Laser
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