Fabrication of NbN/AlN/NbN junctions with Al embedding circuits on Si membrane for 1.5 THz SIS mixers

1999 ◽  
Vol 6 (10-12) ◽  
pp. 541-545 ◽  
Author(s):  
J.-C Villégier ◽  
B Delaet ◽  
V Larrey ◽  
M Salez ◽  
Y Delorme ◽  
...  
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