scholarly journals Quality factor control of mechanical resonators using variable phononic bandgap on periodic microstructures

2022 ◽  
Vol 12 (1) ◽  
Author(s):  
Naoki Inomata ◽  
Yuka Tonsho ◽  
Takahito Ono
Keyword(s):  
Quality Factor ◽  
Microelectromechanical Systems ◽  
Control Technique ◽  
The Novel ◽  
Mechanical Resonators ◽  
Resonant Sensors ◽  
Periodic Microstructure ◽  
Periodic Microstructures ◽  
Optimal Values ◽  
Structural Methods

AbstractThe quality factor (Q-factor) is an important parameter for mechanical resonant sensors, and the optimal values depend on its application. Therefore, Q-factor control is essential for microelectromechanical systems (MEMS). Conventional methods have some restrictions, such as additional and complicated equipment or nanoscale dimensions; thus, structural methods are one of the reasonable solutions for simplifying the system. In this study, we demonstrate Q-factor control using a variable phononic bandgap by changing the length of the periodic microstructure. For this, silicon microstructure is used because it has both periodicity and a spring structure. The bandgap change is experimentally confirmed by measuring the Q-factors of mechanical resonators with different resonant frequencies. The bandgap range varies depending on the extended structure length, followed by a change in the Q-factor value. In addition, the effects of the periodic structure on the Q-factor enhancement and the influence of stress on the structural length were evaluated. Although microstructures can improve the Q-factors irrespective of periodicity; the result of the periodic microstructure is found to be efficient. The proposed method is feasible as the novel Q-factor control technique has good compatibility with conventional MEMS.

Mode coupling and locking of a Π-shaped cantilever resonator using laser-induced asymmetric modulation

2021 ◽  
Author(s):  
Wenyao Luo ◽  
Naikun Gao ◽  
Yanyan Li ◽  
Zhixin Zhao ◽  
Duo Liu
Keyword(s):  
Information Technology ◽  
Quality Factor ◽  
Mode Coupling ◽  
Microelectromechanical Systems ◽  
Mechanical Resonators ◽  
Signal To Noise ◽  
Resonant Frequencies ◽  
Asymmetric Modulation ◽  
Specific Geometry ◽  
Cantilevered Beams

Abstract Mechanical resonators, such as microcantilevers, demonstrate significant potential for use in information technology. Cantilevered beams of various geometries clamped at one end form the most ubiquitous structures in microelectromechanical systems (MEMSs) that support multimode vibration for the detection, conversion, and processing of small signals. In this study, we demonstrate that the potential of these devices can be further extended by utilizing a strategy based on mode coupling and locking induced by asymmetric photothermal modulation. A cantilever was designed to have a Π-shape with a specific geometry such that the resonant frequencies of the two orthogonal modes are close to one another. Additionally, we show that mode coupling between the two modes, which are originally orthogonal to one another, can be achieved through laser-induced photothermal modulation. In particular, the two modes can be parametrically tuned to become degenerate through mode coupling with a significant increase in the quality factor from 112 to 839. This approach is universal and can be extended to improve the detection limits of microresonators in high-dissipation environments with enhanced signal-to-noise ratios.

scholarly journals Carbon Nanotubes as Ultrahigh Quality Factor Mechanical Resonators

Nano Letters ◽  
2009 ◽  
Vol 9 (7) ◽  
pp. 2547-2552 ◽  
Author(s):  
Andreas K. Hüttel ◽  
Gary A. Steele ◽  
Benoit Witkamp ◽  
Menno Poot ◽  
Leo P. Kouwenhoven ◽  
...  
Keyword(s):  
Carbon Nanotubes ◽  
Quality Factor ◽  
Mechanical Resonators

scholarly journals High quality factor mg-scale silicon mechanical resonators for 3-mode optoacoustic parametric amplifiers

2013 ◽  
Vol 114 (1) ◽  
pp. 014506 ◽  
Author(s):  
F. A. Torres ◽  
P. Meng ◽  
L. Ju ◽  
C. Zhao ◽  
D. G. Blair ◽  
...  
Keyword(s):  
Quality Factor ◽  
High Quality Factor ◽  
Parametric Amplifiers ◽  
Mechanical Resonators ◽  
High Quality

A simple technique to increase the quality factor of micro-mechanical resonators

2009 ◽  
Author(s):  
Ross G. Turnbull ◽  
Mike C. L. Ward ◽  
Steve Collins ◽  
Carl J. Anthony
Keyword(s):  
Quality Factor ◽  
Simple Technique ◽  
Mechanical Resonators

scholarly journals Erratum: CORRIGENDUM: Quantum Limit of Quality Factor in Silicon Micro and Nano Mechanical Resonators

2014 ◽  
Vol 4 (1) ◽  
Author(s):  
Shirin Ghaffari ◽  
Saurabh A. Chandorkar ◽  
Shasha Wang ◽  
Eldwin J. Ng ◽  
Chae H. Ahn ◽  
...  
Keyword(s):  
Quality Factor ◽  
Quantum Limit ◽  
Mechanical Resonators

scholarly journals Hybrid DTC strategy based on predictive control with optimization of the PI controller parameters for TPIM drives

2021 ◽  
Vol 34 (02) ◽  
pp. 698-709
Author(s):  
Mehdi Ahmadi Taleshian ◽  
Mahmood Ghanbari ◽  
Seyed Mehdi Rakhtala
Keyword(s):  
Vector Control ◽  
Predictive Control ◽  
Control Method ◽  
Direct Torque Control ◽  
Induction Machine ◽  
Pi Controller ◽  
Torque Control ◽  
Control Technique ◽  
Three Phase ◽  
Optimal Values

In this paper, a novel hybrid Direct Torque Control (DTC) strategy based on predictive control with optimization of the Proportional-Integral (PI) controller to improve overall performances of Three-Phase Induction Machine (TPIM) drives is proposed. The presented control technique has contained merits of the DTC method such as fast dynamic response, simple structure, less dependence to machine parameters and merits of vector control method such as high accuracy. Furthermore, a hybrid DTC method with optimal voltage vectors is presented.  In the proposed control system, Genetic Algorithm (GA) is employed to obtain optimal values of the PI controller parameters. Finally, simulation results under the presented control strategy showed good performances of this method in comparison with DTC and vector control techniques.

scholarly journals MEMS resonator mass loading noise model: The case of bimodal adsorbing surface and finite adsorbate amount

2021 ◽  
Vol 34 (3) ◽  
pp. 367-380
Author(s):  
Ivana Jokic ◽  
Olga Jaksic ◽  
Milos Frantlovic ◽  
Zoran Jaksic ◽  
Koushik Guha
Keyword(s):  
Microelectromechanical Systems ◽  
Noise Model ◽  
Stable Operation ◽  
Mass Loading ◽  
Mems Devices ◽  
Design Development ◽  
Resonant Sensors ◽  
Mems Resonator ◽  
Novel Approach ◽  
Adsorption Desorption

Modeling of adsorption and desorption in microelectromechanical systems (MEMS) generally is crucial for their optimization and control, whether it is necessary to decrease the adsorption-desorption influence (thus ensuring stable operation of ultra-precise micro and nanoresonators) or to increase it (and enhancing in this manner the sensitivity of chemical and biological resonant sensors). In this work we derive and use analytical mathematical expressions to model stochastic fluctuations of the mass adsorbed on the MEMS resonator (mass loading noise). We consider the case where the resonator surface incorporates two different types of binding sites and where non-negligible depletion of the adsorbate occurs in a closed resonator chamber. We arrive at a novel expression for the power spectral density of mass loading noise in resonators and prove the necessity of its application in cases when resonators are exposed to low adsorbate concentrations. We use the novel approach presented here to calculate the resonator performance. In this way we ensure optimization of these MEMS devices and consequentially abatement of adsorption-desorption noise-caused degradation of their operation, both in the case of micro/nanoresonators and resonant sensors. This work is intended for a general use in the design, development and optimization of different MEMS systems based on mechanical resonators, ranging from the RF components to chemical and biological sensors.

High, Size-Dependent Quality Factor in an Array of Graphene Mechanical Resonators

Nano Letters ◽  
2011 ◽  
Vol 11 (3) ◽  
pp. 1232-1236 ◽  
Author(s):  
Robert A. Barton ◽  
B. Ilic ◽  
Arend M. van der Zande ◽  
William S. Whitney ◽  
Paul L. McEuen ◽  
...  
Keyword(s):  
Quality Factor ◽  
Mechanical Resonators ◽  
Size Dependent
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