Damage and recovery induced by a high energy e-beam in a silicon nanofilm
Keyword(s):
Herein, electron beam-induced damage and recovery of a silicon thin film was investigatedin situ viatransmission electron microscopy (TEM).
1972 ◽
Vol 30
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pp. 544-545
1989 ◽
Vol 47
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pp. 462-463
2019 ◽
Vol 12
(10)
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pp. 3144-3155
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1990 ◽
2020 ◽
2020 ◽
Vol 378
(2186)
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pp. 20190602
1985 ◽
Vol 43
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pp. 358-359