MBE grown Npn AlGaAs/GaAs bipolar transistors with C p doping by electron cyclotron resonance source activated methane

G. Liu; D. Mui; S. Fang; G. Gao; H. Morkoç

doi:10.1049/el:19910293

MBE grown Npn AlGaAs/GaAs bipolar transistors with C p doping by electron cyclotron resonance source activated methane

Electronics Letters ◽

10.1049/el:19910293 ◽

1991 ◽

Vol 27 (5) ◽

pp. 465 ◽

Cited By ~ 1

Author(s):

G. Liu ◽

D. Mui ◽

S. Fang ◽

G. Gao ◽

H. Morkoç

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Bipolar Transistors ◽

Electron Cyclotron

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Chemical and electrical characterization of AlGaAs/GaAs heterojunction bipolar transistors treated by electron cyclotron resonance plasmas

Applied Physics Letters ◽

10.1063/1.107122 ◽

1992 ◽

Vol 60 (16) ◽

pp. 1996-1998 ◽

Cited By ~ 10

Author(s):

P. W. Li ◽

Q. Wang ◽

E. S. Yang

Keyword(s):

Heterojunction Bipolar Transistors ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electrical Characterization ◽

Bipolar Transistors ◽

Electron Cyclotron

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Low damage etching of InGaAs/AlGaAs by the electron cyclotron resonance plasma with Cl2/He mixture for heterojunction bipolar transistors

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.587033 ◽

1994 ◽

Vol 12 (2) ◽

pp. 530 ◽

Cited By ~ 1

Author(s):

S. Miyakuni

Keyword(s):

Heterojunction Bipolar Transistors ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Bipolar Transistors ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Electron cyclotron resonance hydrogen and nitrogen plasma surface passivation of AlGaAs/GaAs heterojunction bipolar transistors

IEEE Electron Device Letters ◽

10.1109/55.144966 ◽

1992 ◽

Vol 13 (2) ◽

pp. 83-85 ◽

Cited By ~ 17

Author(s):

Q. Wang ◽

P.W. Li ◽

R.M. Osgood ◽

W.I. Wang ◽

E.S. Yang ◽

...

Keyword(s):

Heterojunction Bipolar Transistors ◽

Cyclotron Resonance ◽

Surface Passivation ◽

Electron Cyclotron Resonance ◽

Nitrogen Plasma ◽

Bipolar Transistors ◽

Electron Cyclotron ◽

Plasma Surface

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AlInAs/InGaAs based heterojunction bipolar transistors fabricated by electron cyclotron resonance etch

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.585448 ◽

1991 ◽

Vol 9 (3) ◽

pp. 1445 ◽

Cited By ~ 22

Author(s):

T. R. Fullowan

Keyword(s):

Heterojunction Bipolar Transistors ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Bipolar Transistors ◽

Electron Cyclotron

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CALIBRATION OF HIGH MAGNETIC FIELDS USING FREE ELECTRON CYCLOTRON RESONANCE IN A PLASMA

Le Journal de Physique Colloques ◽

10.1051/jphyscol:19841196 ◽

1984 ◽

Vol 45 (C1) ◽

pp. C1-961-C1-963

Author(s):

J. C. Maan ◽

H.-J. Schneider Muntau ◽

A. Dorelon

Keyword(s):

Magnetic Fields ◽

Free Electron ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

High Magnetic Fields

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Anisotropic electron cyclotron resonance etching of tungsten films on GaAs

Electronics Letters ◽

10.1049/el:19940006 ◽

1994 ◽

Vol 30 (1) ◽

pp. 84-85 ◽

Cited By ~ 4

Author(s):

R.J. Shul ◽

D.J. Rieger ◽

C. Constantine ◽

A.G. Baca ◽

C. Barratt

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron

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Characterization and optimization of electron cyclotron resonance ion source

IET-UK International Conference on Information and Communication Technology in Electrical Sciences (ICTES 2007) ◽

10.1049/ic:20070703 ◽

2007 ◽

Author(s):

R. Henry

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Ion Source ◽

Electron Cyclotron

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Exploration of the afterglow of the pulsed electron cyclotron resonance source under the injection of neutral fluxes

Review of Scientific Instruments ◽

10.1063/1.1148645 ◽

1998 ◽

Vol 69 (2) ◽

pp. 1129-1131 ◽

Cited By ~ 2

Author(s):

V. Mironov ◽

G. Shirkov ◽

O. Strekalovsky ◽

N. Tokareva

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron

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Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

Applied Physics Letters ◽

10.1063/1.102487 ◽

1990 ◽

Vol 56 (15) ◽

pp. 1424-1426 ◽

Cited By ~ 52

Author(s):

S. J. Pearton ◽

U. K. Chakrabarti ◽

A. P. Kinsella ◽

D. Johnson ◽

C. Constantine

Keyword(s):

Plasma Etching ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Electron cyclotron resonance charge breeder plasma parameters from the modeling of 1+ beam stopping

Physical Review Accelerators and Beams ◽

10.1103/physrevaccelbeams.24.073403 ◽

2021 ◽

Vol 24 (7) ◽

Author(s):

A. Annaluru ◽

P. Delahaye ◽

M. Dubois ◽

L. Maunoury

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Plasma Parameters ◽

Charge Breeder ◽

Resonance Charge

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