scholarly journals Near-Field Cross Section Imaging of Wideband Millimeter Wave

2016 ◽  
Vol 56 ◽  
pp. 02001 ◽  
Author(s):  
Yingzhi Kan ◽  
Yongfeng Zhu ◽  
Qiang Fu
Keyword(s):  
Millimeter Wave ◽  
Cross Section ◽  
Near Field

scholarly journals Near-Field Scanning Millimeter-Wave Microscope Operating Inside a Scanning Electron Microscope: Towards Quantitative Electrical Nanocharacterization

2021 ◽  
Vol 11 (6) ◽  
pp. 2788
Author(s):  
Petr Polovodov ◽  
Didier Théron ◽  
Clément Lenoir ◽  
Dominique Deresmes ◽  
Sophie Eliet ◽  
...  
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Millimeter Wave ◽  
Radiation Effects ◽  
Near Field ◽  
Complex Impedance ◽  
Standard Operating Procedure ◽  
Critical Issue ◽  
Transverse Electromagnetic ◽  
Scanning Electron

The main objectives of this work are the development of fundamental extensions to existing scanning microwave microscopy (SMM) technology to achieve quantitative complex impedance measurements at the nanoscale. We developed a SMM operating up to 67 GHz inside a scanning electron microscope, providing unique advantages to tackle issues commonly found in open-air SMMs. Operating in the millimeter-wave frequency range induces high collimation of the evanescent electrical fields in the vicinity of the probe apex, resulting in high spatial resolution and enhanced sensitivity. Operating in a vacuum allows for eliminating the water meniscus on the tip apex, which remains a critical issue to address modeling and quantitative analysis at the nanoscale. In addition, a microstrip probing structure was developed to ensure a transverse electromagnetic mode as close as possible to the tip apex, drastically reducing radiation effects and parasitic apex-to-ground capacitances with available SMM probes. As a demonstration, we describe a standard operating procedure for instrumentation configuration, measurements and data analysis. Measurement performance is exemplarily shown on a staircase microcapacitor sample at 30 GHz.

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