Ellipsometric study of silicon surface damage in electron cyclotron resonance plasma etching using CF4and SF6

1992 ◽  
Vol 61 (24) ◽  
pp. 2875-2877 ◽  
Author(s):  
M. Haverlag ◽  
D. Vender ◽  
G. S. Oehrlein
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Silicon Surface ◽  
Electron Cyclotron Resonance ◽  
Surface Damage ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Ellipsometric Study ◽  
Resonance Plasma

Damage Induced by Electron Cyclotron Resonance Plasma Etching on Silicon Surface

1991 ◽  
Vol 30 (Part 1, No. 5) ◽  
pp. 1045-1049 ◽  
Author(s):  
Gen Washidzu ◽  
Tohru Hara ◽  
Jun Hiyoshi ◽  
Masami Sasaki ◽  
Yasuhiro Suzuki ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Silicon Surface ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

1990 ◽  
Vol 56 (15) ◽  
pp. 1424-1426 ◽  
Author(s):  
S. J. Pearton ◽  
U. K. Chakrabarti ◽  
A. P. Kinsella ◽  
D. Johnson ◽  
C. Constantine
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

ICl/Ar electron cyclotron resonance plasma etching of III–V nitrides

1996 ◽  
Vol 69 (10) ◽  
pp. 1426-1428 ◽  
Author(s):  
C. B. Vartuli ◽  
S. J. Pearton ◽  
J. W. Lee ◽  
J. Hong ◽  
J. D. MacKenzie ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

scholarly journals Ultradeep electron cyclotron resonance plasma etching of GaN

2017 ◽  
Vol 35 (6) ◽  
pp. 061303 ◽  
Author(s):  
Sara E. Harrison ◽  
Lars F. Voss ◽  
Andrea M. Torres ◽  
Clint D. Frye ◽  
Qinghui Shao ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
Sign in / Sign up

Export Citation Format

Share Document