Characteristics of C3 radicals in high-density C4F8 plasmas studied by laser-induced fluorescence spectroscopy

2000 ◽  
Vol 88 (11) ◽  
pp. 6201-6206 ◽  
Author(s):  
K. Takizawa ◽  
K. Sasaki ◽  
K. Kadota
2021 ◽  
Vol 211 ◽  
pp. 105001
Author(s):  
Amanda M. Tadini ◽  
Alfredo A.P. Xavier ◽  
Débora M.B.P. Milori ◽  
Patrícia P.A. Oliveira ◽  
José R. Pezzopane ◽  
...  

2004 ◽  
Vol 120 (6) ◽  
pp. 2662-2666 ◽  
Author(s):  
Masakazu Nakajima ◽  
Yu Yoneda ◽  
Yoshihiro Sumiyoshi ◽  
Yasuki Endo

1986 ◽  
Vol 39 (2) ◽  
pp. 91-95 ◽  
Author(s):  
H. F. D�bele ◽  
M. H�rl ◽  
M. R�wekamp ◽  
B. Reimann

Sign in / Sign up

Export Citation Format

Share Document