Characteristics of C3 radicals in high-density C4F8 plasmas studied by laser-induced fluorescence spectroscopy

2000 ◽  
Vol 88 (11) ◽  
pp. 6201-6206 ◽  
Author(s):  
K. Takizawa ◽  
K. Sasaki ◽  
K. Kadota
2004 ◽  
Vol 120 (6) ◽  
pp. 2662-2666 ◽  
Author(s):  
Masakazu Nakajima ◽  
Yu Yoneda ◽  
Yoshihiro Sumiyoshi ◽  
Yasuki Endo

2001 ◽  
Vol 72 (11) ◽  
pp. 4300-4301 ◽  
Author(s):  
Stefan Rosén ◽  
Mats Larsson ◽  
Peder Royen ◽  
Danijela Rostohar ◽  
Johan Lidberg ◽  
...  

2009 ◽  
Vol 130 (14) ◽  
pp. 144313 ◽  
Author(s):  
Neil J. Reilly ◽  
Masakazu Nakajima ◽  
Bligh A. Gibson ◽  
Timothy W. Schmidt ◽  
Scott H. Kable

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