Kinetics of hydrogen atoms in high-density CF4/H2 plasmas studied by (2+1)-photon laser-induced fluorescence spectroscopy
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1985 ◽
Vol 26
(11)
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pp. 1285-1293
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1992 ◽
pp. 183-190
2000 ◽
Vol 17
(12)
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pp. 2148
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2004 ◽
Vol 120
(6)
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pp. 2662-2666
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