Laser‐induced fluorescence spectroscopy for the determination of the absolute density and spatial distribution of Si atoms in a SiH4‐He‐Ar glow discharge

1988 ◽  
Vol 64 (3) ◽  
pp. 1050-1054 ◽  
Author(s):  
Y. Takubo ◽  
Y. Takasugi ◽  
M. Yamamoto
Metrologia ◽  
1995 ◽  
Vol 32 (5) ◽  
pp. 333-362 ◽  
Author(s):  
R Masui ◽  
K Fujii ◽  
M Takenaka

2012 ◽  
Vol 6 (1) ◽  
pp. 672-675
Author(s):  
Dazhou Zhu ◽  
Qiong Wu ◽  
Zhihong Ma ◽  
Dongyan Zhang ◽  
Wenjiang Huang ◽  
...  

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