Laser‐induced fluorescence spectroscopy for the determination of the absolute density and spatial distribution of Si atoms in a SiH4‐He‐Ar glow discharge
2007 ◽
Vol 241
(2)
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pp. 230-236
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Keyword(s):
2011 ◽
Vol 44
(20)
◽
pp. 205201
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1990 ◽
Vol 32
(3)
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pp. 163-171
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Keyword(s):