SiF2as a primary desorption product of Si etching by F atoms: Interpretation of laser‐induced fluorescence spectra; rate constant of the gas phase SiF2+F reaction
2020 ◽
1975 ◽
Vol 97
(7)
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pp. 1707-1710
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2001 ◽
Vol 22
(2)
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pp. 151-155
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1996 ◽
Vol 28
(2)
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pp. 109-114
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1996 ◽
Vol 64
(4)
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pp. 720-735
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1990 ◽
Vol 95
(D9)
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pp. 13981
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1983 ◽
Vol 78
(6)
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pp. 3673-3687
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Vol 18
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pp. 387-396
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