Interference sensor for ultra-precision measurement of laser beam angular deflection

2018 ◽  
Vol 89 (11) ◽  
pp. 115003 ◽  
Author(s):  
Marek Dobosz
Keyword(s):  
Laser Beam ◽  
Precision Measurement ◽  
Angular Deflection ◽  
Ultra Precision

Interference method for ultra-precision measurement and compensation of laser beam angular deflection

2013 ◽  
Vol 53 (1) ◽  
pp. 111 ◽  
Author(s):  
Marek Dobosz ◽  
Olga Iwasinska-Kowalska
Keyword(s):  
Laser Beam ◽  
Precision Measurement ◽  
Interference Method ◽  
Angular Deflection ◽  
Ultra Precision

scholarly journals An Investigation of the Cutting Strategy for the Machining of Polar Microstructures Used in Ultra-Precision Machining Optical Precision Measurement

Micromachines ◽  
2021 ◽  
Vol 12 (7) ◽  
pp. 755
Author(s):  
Chen-Yang Zhao ◽  
Chi-Fai Cheung ◽  
Wen-Peng Fu
Keyword(s):  
Precision Measurement ◽  
Detection Algorithm ◽  
Surface Generation ◽  
Precision Machining ◽  
Tool Geometry ◽  
Depth Of Cut ◽  
Machining Parameters ◽  
Ultra Precision ◽  
Transition Points ◽  
Cutting Strategy

In this paper, an investigation of cutting strategy is presented for the optimization of machining parameters in the ultra-precision machining of polar microstructures, which are used for optical precision measurement. The critical machining parameters affecting the surface generation and surface quality in the machining of polar microstructures are studied. Hence, the critical ranges of machining parameters have been determined through a series of cutting simulations, as well as cutting experiments. First of all, the influence of field of view (FOV) is investigated. After that, theoretical modeling of polar microstructures is built to generate the simulated surface topography of polar microstructures. A feature point detection algorithm is built for image processing of polar microstructures. Hence, an experimental investigation of the influence of cutting tool geometry, depth of cut, and groove spacing of polar microstructures was conducted. There are transition points from which the patterns of surface generation of polar microstructures vary with the machining parameters. The optimization of machining parameters and determination of the optimized cutting strategy are undertaken in the ultra-precision machining of polar microstructures.

1502 Precision Measurement of Vertical Straightness of a Roll Workpiece on an Ultra-Precision Lathe

2015 ◽  
Vol 2015.8 (0) ◽  
pp. _1502-1_-_1502-4_
Author(s):  
Zengyuan NIU ◽  
Yuanliu CHEN ◽  
Daiki MATSUURA ◽  
Ryo KOBAYASHI ◽  
Yuki SHIMIZU ◽  
...  
Keyword(s):  
Precision Measurement ◽  
Ultra Precision

Fast scanning method for one-dimensional surface profile measurement by detecting angular deflection of a laser beam

2004 ◽  
Vol 43 (21) ◽  
pp. 4157 ◽  
Author(s):  
Ryo Shinozaki ◽  
Osami Sasaki ◽  
Takamasa Suzuki
Keyword(s):  
Laser Beam ◽  
Surface Profile ◽  
Profile Measurement ◽  
Scanning Method ◽  
One Dimensional ◽  
Angular Deflection ◽  
Dimensional Surface ◽  
Surface Profile Measurement

scholarly journals Algorithms for High-speed Generating CRC Error Detection Coding in Separated Ultra-precision Measurement

2006 ◽  
Vol 48 ◽  
pp. 228-232
Author(s):  
Z Zhi ◽  
J B Tan ◽  
X D Huang ◽  
F F Chen
Keyword(s):  
Error Detection ◽  
Precision Measurement ◽  
High Speed ◽  
Ultra Precision

Precision measurement of Z-slide vertical error motion of an ultra-precision lathe by using three-probe method

2017 ◽  
Vol 18 (5) ◽  
pp. 651-660 ◽  
Author(s):  
Zengyuan Niu ◽  
Yuan-Liu Chen ◽  
Daiki Matsuura ◽  
Jung Chul Lee ◽  
Ryo Kobayashi ◽  
...  
Keyword(s):  
Precision Measurement ◽  
Probe Method ◽  
Vertical Error ◽  
Ultra Precision ◽  
Error Motion

Submicroradian laser beam angular scan precision measurement by interference method

2009 ◽  
Vol 48 (7) ◽  
pp. 073607 ◽  
Author(s):  
Jianfeng Sun
Keyword(s):  
Laser Beam ◽  
Precision Measurement ◽  
Interference Method

scholarly journals A Study on Dynamic Modeling of the Vibration Isolation System for the Ultra Precision Measurement

2009 ◽  
Vol 10 (1) ◽  
pp. 25-31
Author(s):  
Sung-Wan Son ◽  
Sung-Ho Jang ◽  
Jae-Ho Baek ◽  
Chong-Keun Chun ◽  
Young-Chul Kwon
Keyword(s):  
Dynamic Modeling ◽  
Precision Measurement ◽  
Vibration Isolation ◽  
Isolation System ◽  
Vibration Isolation System ◽  
Ultra Precision

High-Accuracy Intelligent Complex System by Using Electronic Parallel Datum

2007 ◽  
Author(s):  
Xiang-Wen Xiong ◽  
Bear L. Wynn
Keyword(s):  
Laser Beam ◽  
Control Method ◽  
Ion Beam ◽  
Control Process ◽  
Optical Emission ◽  
Work Piece ◽  
Beam Diameter ◽  
Direct Reading ◽  
Ultra Precision ◽  
Precise Testing

The method of electronic parallel datum is to calculate by a stereo angle between the two beams of light with inclination simulating parameters of an object and successfully replace the 6-DOF mechanical datum of the work piece by being pre-set in the work piece and system. This technique called electronic parallel datum method has high precision for the adoption of Scan & Micro-Staggered method; furthermore, the intelligent direct reading of 6-DOF mechanical datum and parameter storage function of the technique can greatly improve the performance of the system and at the same time offer the process control method and can be used for micro-fabrication and Micro-Manufacturing and general industrial (In particular, it can be used for Ultra precision manufacturing environment, because the diameter of the laser beam can reach 100 nm and ion beam diameter even reached the limit precision of 2nm, and optical emission types, including the ion beam, Universal laser beam and general light beam, which mainly use receiver spacing of nano-array CCD sensors). It is widely used in the intelligent control process and system such as installation and adjustment, and undoubtedly, is to be adopted in many technical fields, general Manufacturing and all general work piece, precise testing process. With the method the system will become more precise, run faster and cost less.

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