Interference sensor for ultra-precision measurement of laser beam angular deflection

2018 ◽  
Vol 89 (11) ◽  
pp. 115003 ◽  
Author(s):  
Marek Dobosz



Micromachines ◽  
2021 ◽  
Vol 12 (7) ◽  
pp. 755
Author(s):  
Chen-Yang Zhao ◽  
Chi-Fai Cheung ◽  
Wen-Peng Fu

In this paper, an investigation of cutting strategy is presented for the optimization of machining parameters in the ultra-precision machining of polar microstructures, which are used for optical precision measurement. The critical machining parameters affecting the surface generation and surface quality in the machining of polar microstructures are studied. Hence, the critical ranges of machining parameters have been determined through a series of cutting simulations, as well as cutting experiments. First of all, the influence of field of view (FOV) is investigated. After that, theoretical modeling of polar microstructures is built to generate the simulated surface topography of polar microstructures. A feature point detection algorithm is built for image processing of polar microstructures. Hence, an experimental investigation of the influence of cutting tool geometry, depth of cut, and groove spacing of polar microstructures was conducted. There are transition points from which the patterns of surface generation of polar microstructures vary with the machining parameters. The optimization of machining parameters and determination of the optimized cutting strategy are undertaken in the ultra-precision machining of polar microstructures.



Author(s):  
Zengyuan NIU ◽  
Yuanliu CHEN ◽  
Daiki MATSUURA ◽  
Ryo KOBAYASHI ◽  
Yuki SHIMIZU ◽  
...  






Author(s):  
Zengyuan Niu ◽  
Yuan-Liu Chen ◽  
Daiki Matsuura ◽  
Jung Chul Lee ◽  
Ryo Kobayashi ◽  
...  




Author(s):  
Sung-Wan Son ◽  
Sung-Ho Jang ◽  
Jae-Ho Baek ◽  
Chong-Keun Chun ◽  
Young-Chul Kwon


Author(s):  
Xiang-Wen Xiong ◽  
Bear L. Wynn

The method of electronic parallel datum is to calculate by a stereo angle between the two beams of light with inclination simulating parameters of an object and successfully replace the 6-DOF mechanical datum of the work piece by being pre-set in the work piece and system. This technique called electronic parallel datum method has high precision for the adoption of Scan & Micro-Staggered method; furthermore, the intelligent direct reading of 6-DOF mechanical datum and parameter storage function of the technique can greatly improve the performance of the system and at the same time offer the process control method and can be used for micro-fabrication and Micro-Manufacturing and general industrial (In particular, it can be used for Ultra precision manufacturing environment, because the diameter of the laser beam can reach 100 nm and ion beam diameter even reached the limit precision of 2nm, and optical emission types, including the ion beam, Universal laser beam and general light beam, which mainly use receiver spacing of nano-array CCD sensors). It is widely used in the intelligent control process and system such as installation and adjustment, and undoubtedly, is to be adopted in many technical fields, general Manufacturing and all general work piece, precise testing process. With the method the system will become more precise, run faster and cost less.



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