Effects of electrode gap on radio-frequency discharge characteristics with a hollow electrode

2020 ◽  
Vol 27 (12) ◽  
pp. 123511
Author(s):  
Liuliang He ◽  
Feng He ◽  
Jiting Ouyang ◽  
Wenna Dou
Keyword(s):  
Radio Frequency ◽  
Electrode Gap ◽  
Discharge Characteristics ◽  
Hollow Electrode ◽  
Radio Frequency Discharge

Silane thermometry in radio‐frequency discharge plasma by coherent anti‐Stokes Raman spectroscopy

1986 ◽  
Vol 59 (6) ◽  
pp. 1872-1874 ◽  
Author(s):  
Nobuhiro Hata ◽  
Akihisa Matsuda ◽  
Kazunobu Tanaka
Keyword(s):  
Raman Spectroscopy ◽  
Radio Frequency ◽  
Discharge Plasma ◽  
Anti Stokes ◽  
Radio Frequency Discharge

Power dissipated in low‐pressure radio‐frequency discharge plasmas

1985 ◽  
Vol 57 (1) ◽  
pp. 53-58 ◽  
Author(s):  
O. A. Popov ◽  
V. A. Godyak
Keyword(s):  
Radio Frequency ◽  
Low Pressure ◽  
Discharge Plasmas ◽  
Radio Frequency Discharge

scholarly journals Combined PIC–MCC approach for fast simulation of a radio frequency discharge at a low gas pressure

2004 ◽  
Vol 13 (2) ◽  
pp. 315-320 ◽  
Author(s):  
I V Schweigert ◽  
V A Schweigert
Keyword(s):  
Radio Frequency ◽  
Gas Pressure ◽  
Fast Simulation ◽  
Radio Frequency Discharge

Probe measurements of the space potential in a radio frequency discharge

1990 ◽  
Vol 68 (7) ◽  
pp. 3157-3162 ◽  
Author(s):  
V. A. Godyak ◽  
R. B. Piejak
Keyword(s):  
Radio Frequency ◽  
Space Potential ◽  
Radio Frequency Discharge ◽  
Probe Measurements

scholarly journals Space and phase resolved plasma parameters in an industrial dual-frequency capacitively coupled radio-frequency discharge

2007 ◽  
Vol 40 (22) ◽  
pp. 7008-7018 ◽  
Author(s):  
J Schulze ◽  
T Gans ◽  
D O'Connell ◽  
U Czarnetzki ◽  
A R Ellingboe ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Dual Frequency ◽  
Plasma Parameters ◽  
Capacitively Coupled ◽  
Radio Frequency Discharge

Ni-based catalysts with coke resistance enhance by radio frequency discharge plasma for CH4/CO2 reforming

2022 ◽  
Author(s):  
Junqiang Xu ◽  
Yalin Liu ◽  
Huan Tian ◽  
Qiang Zhang ◽  
Wuyi Cao ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Discharge Plasma ◽  
Co2 Reforming ◽  
Radio Frequency Discharge

On the Ions in an Argon-Hexamethyldisiloxane Radio-Frequency-Discharge

1994 ◽  
pp. 335-341 ◽  
Author(s):  
Rüdiger Foest ◽  
Martin Schmidt ◽  
Mario Hannemann ◽  
Ralf Basner
Keyword(s):  
Radio Frequency ◽  
Radio Frequency Discharge
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