Gas-phase kinetics in atmospheric-pressure plasma-enhanced chemical vapor deposition of silicon films

2021 ◽  
Vol 130 (5) ◽  
pp. 053307
Author(s):  
Hiroaki Kakiuchi ◽  
Hiromasa Ohmi ◽  
Kiyoshi Yasutake
Keyword(s):  
Chemical Vapor Deposition ◽  
Gas Phase ◽  
Vapor Deposition ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Chemical Vapor ◽  
Silicon Films ◽  
Gas Phase Kinetics ◽  
Pressure Plasma

Atmospheric pressure plasma enhanced chemical vapor deposition of hydrophobic coatings using fluorine-based liquid precursors

2013 ◽  
Vol 234 ◽  
pp. 21-32 ◽  
Author(s):  
Jacqueline H. Yim ◽  
Victor Rodriguez-Santiago ◽  
André A. Williams ◽  
Theodosia Gougousi ◽  
Daphne D. Pappas ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Chemical Vapor ◽  
Hydrophobic Coatings ◽  
Pressure Plasma ◽  
Liquid Precursors
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