Role of high-frequency power in C4F8dual-frequency capacitively coupled plasmas treating high-kHfO2films
2013 ◽
Vol 46
(43)
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pp. 435102
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2018 ◽
Vol 7
(1)
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pp. 35-42
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2017 ◽
Vol 38
(6)
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pp. 771-774
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1951 ◽
Vol 6
(4)
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pp. 280-281
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