Self-aligned tip deinsulation of atomic layer deposited Al2O3and parylene C coated Utah electrode array based neural interfaces
2014 ◽
Vol 24
(3)
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pp. 035003
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2014 ◽
Vol 11
(2)
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pp. 026016
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2012 ◽
Vol 166-167
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pp. 777-786
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2012 ◽
Vol 22
(10)
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pp. 105036
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2016 ◽
Vol 13
(6)
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pp. 061003
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2013 ◽
Vol 215
(1)
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pp. 78-87
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Keyword(s):
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