Time resolved electron density and temperature measurements on a capacitively coupled helium RF discharge

2002 ◽  
Vol 11 (4) ◽  
pp. 466-475 ◽  
Author(s):  
M J van de Sande ◽  
R H M Deckers ◽  
F Lepkojus ◽  
W Buscher ◽  
J J A M van der Mullen
Keyword(s):  
Electron Density ◽  
Temperature Measurements ◽  
Rf Discharge ◽  
Time Resolved ◽  
Capacitively Coupled ◽  
Electron Density And Temperature

scholarly journals Diagnostics of low-pressure capacitively coupled RF discharge argon plasma

2019 ◽  
Vol 13 (27) ◽  
pp. 76-82
Author(s):  
Kadhim A. Aadim
Keyword(s):  
Electron Temperature ◽  
Electron Density ◽  
Langmuir Probe ◽  
Gas Flow ◽  
Low Pressure ◽  
Gas Pressure ◽  
Rf Discharge ◽  
Electrode Gap ◽  
Probe Characteristic ◽  
Capacitively Coupled

Low-pressure capacitively coupled RF discharge Ar plasma has been studied using Langmuir probe. The electron temperature, electron density and Debay length were calculated under different pressures and electrode gap. In this work the RF Langmuir probe is designed using 4MHz filter as compensation circuit and I-V probe characteristic have been investigated. The pressure varied from 0.07 mbar to 0.1 mbar while electrode gap varied from 2-5 cm. The plasma was generated using power supply at 4MHz frequency with power 300 W. The flowmeter is used to control Argon gas flow in the range of 600 standard cubic centimeters per minute (sccm). The electron temperature drops slowly with pressure and it's gradually decreased when expanding the electrode gap. As the gas pressure increases, the plasma density rises slightly at low gas pressure while it drops little at higher gas pressure. The electron density decreases rapidly with expand distances between electrodes.

Electron density and temperature measurements in TEXTOR ion cyclotron wall conditioning plasmas by thermal Li beam spectroscopy

2011 ◽  
Vol 415 (1) ◽  
pp. S1166-S1169
Author(s):  
R. Laengner ◽  
B. Unterberg ◽  
A. Lyssoivan ◽  
M. Paul ◽  
V. Philipps ◽  
...  
Keyword(s):  
Electron Density ◽  
Temperature Measurements ◽  
Ion Cyclotron ◽  
Electron Density And Temperature

First 3D Reconstructions of Coronal Loops with theSTEREO A+BSpacecraft. II. Electron Density and Temperature Measurements

2008 ◽  
Vol 680 (2) ◽  
pp. 1477-1495 ◽  
Author(s):  
Markus J. Aschwanden ◽  
Nariaki V. Nitta ◽  
Jean‐Pierre Wuelser ◽  
James R. Lemen
Keyword(s):  
Electron Density ◽  
Temperature Measurements ◽  
Coronal Loops ◽  
3D Reconstructions ◽  
Electron Density And Temperature

Electron density and temperature measurements in a laser produced carbon plasma

1997 ◽  
Vol 82 (5) ◽  
pp. 2140-2146 ◽  
Author(s):  
S. S. Harilal ◽  
C. V. Bindhu ◽  
Riju C. Issac ◽  
V. P. N. Nampoori ◽  
C. P. G. Vallabhan
Keyword(s):  
Electron Density ◽  
Temperature Measurements ◽  
Electron Density And Temperature ◽  
Carbon Plasma
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