A Brief Study on the Ignition of the Non-Thermal Atmospheric Pressure Plasma Jet from a Double Dielectric Barrier Configured Plasma Pencil

2013 ◽  
Vol 15 (7) ◽  
pp. 627-634 ◽  
Author(s):  
Asma Begum ◽  
Mounir Laroussi ◽  
M. R. Pervez
Keyword(s):  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Plasma Jet ◽  
Atmospheric Pressure Plasma Jet ◽  
Dielectric Barrier ◽  
Pressure Plasma ◽  
Plasma Pencil

An experimental study of photoresist material etching by an atmospheric-pressure plasma jet with Ar/air mixed gas

2013 ◽  
Vol 79 (5) ◽  
pp. 683-689 ◽  
Author(s):  
LIJUN WANG ◽  
WENJUN NING ◽  
MINGZHENG FU ◽  
CHEN WU ◽  
SHENLI JIA
Keyword(s):  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Plasma Jet ◽  
Atmospheric Pressure Plasma Jet ◽  
Air Plasma ◽  
Pressure Plasma ◽  
Plasma Needle ◽  
Ar Plasma ◽  
Etched Surface ◽  
Plasma Pencil

AbstractIn this paper, electrical and optical emission spectrometer (OES) characteristics of an Ar/air atmospheric-pressure plasma jet (APPJ) based on the plasma needle and plasma pencil systems were investigated and analyzed. Electrical measurement results showed that the breakdown and working voltage of the jet increased with the increase of the ratio of air/Ar, and the emission intensity of Ar* significantly decreased. For the plasma needle, when the ratio of air/Ar reached 1, the OES characteristics of Ar/air were similar to those of air plasma, and the main excited species was N2*. For the plasma pencil, when a little air impurity was added in Ar, the emission intensities of N2* species will be significantly increased. Based on these two APPJ systems, photoresist materials were etched, etched results showed that the etched surface was easier to be oxidized with the addition of air into Ar. The etched surface was cleaner with pure Ar plasma with scanning substrate methods than that with the Ar/air mixture. Etched results of higher ratios of air/Ar plasma were similar to those of air plasma.

High-speed photographs of a dielectric barrier atmospheric pressure plasma jet

2005 ◽  
Vol 33 (2) ◽  
pp. 310-311 ◽  
Author(s):  
M. Teschke ◽  
J. Kedzierski ◽  
E.G. Finantu-Dinu ◽  
D. Korzec ◽  
J. Engemann
Keyword(s):  
Atmospheric Pressure ◽  
High Speed ◽  
Atmospheric Pressure Plasma ◽  
Plasma Jet ◽  
Atmospheric Pressure Plasma Jet ◽  
Dielectric Barrier ◽  
Pressure Plasma
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