scholarly journals Lithium aluminosilicate glass-ceramics for low-temperature anodic sealing of MEMS sensors

2021 ◽  
Vol 2086 (1) ◽  
pp. 012184
Author(s):  
R Kleimanov ◽  
I Komarevtsev ◽  
Y Enns ◽  
Y Akulshin ◽  
A Korshunov ◽  
...  
Keyword(s):  
Glass Ceramics ◽  
Optical Transmittance ◽  
Aluminosilicate Glass ◽  
Anodic Bonding ◽  
Mems Sensors ◽  
Transparent Glass ◽  
Lithium Aluminosilicate ◽  
Bonding Parameters ◽  
Hermetic Sealing ◽  
Atomic Cell

Abstract The results of a study of the anodic bonding parameters of transparent glass-ceramics based on lithium aluminosilicates which are promising as structural materials of MEMS and MOEMS sensors are presented. A comparison of the optical transmittance of these materials and classical for MEMS industry glasses has been carried out. The glass-ceramics electrical conductivity in a wide temperature range has been measured. The procedure of hermetic sealing of glass-ceramics by the anodic bonding at temperatures of 150 – 250 °C has been worked out. A prototype of glass-ceramic atomic cell has been fabricated.

Raman spectroscopy quantifying the composition of stuffed β-quartz derivative phases in lithium aluminosilicate glass-ceramics

2008 ◽  
Vol 354 (45-46) ◽  
pp. 4932-4939 ◽  
Author(s):  
I. Alekseeva ◽  
O. Dymshits ◽  
V. Ermakov ◽  
A. Zhilin ◽  
V. Petrov ◽  
...  
Keyword(s):  
Raman Spectroscopy ◽  
Glass Ceramics ◽  
Aluminosilicate Glass ◽  
Lithium Aluminosilicate

Synthesis and spectroluminescence properties of lithium aluminosilicate glass–ceramics containing Er_xY b_2?xTi_2O_7 nanocrystals

2012 ◽  
Vol 79 (7) ◽  
pp. 415 ◽  
Author(s):  
O. Dymshits ◽  
N. Skoptsov ◽  
A. Malyarevich ◽  
A. Zhilin ◽  
I. Alekseeva ◽  
...  
Keyword(s):  
Glass Ceramics ◽  
Aluminosilicate Glass ◽  
Lithium Aluminosilicate

Research of optical and mechanical properties of lithium aluminosilicate glass-ceramics

2017 ◽  
Vol 459 ◽  
pp. 94-98 ◽  
Author(s):  
Igor Evgenovich Matyash ◽  
Irina Anatoliivna Minailova ◽  
Boris Kirilovich Serdega ◽  
Ivan Stepanovych Babichuk
Keyword(s):  
Mechanical Properties ◽  
Glass Ceramics ◽  
Aluminosilicate Glass ◽  
Lithium Aluminosilicate ◽  
Optical And Mechanical Properties

scholarly journals Effects of Co<sub>2</sub>O<sub>3</sub> on Crystallization and Colorization of Lithium Aluminosilicate Glass Ceramics

2013 ◽  
Vol 03 (03) ◽  
pp. 81-86
Author(s):  
Xingzhong Guo ◽  
Hui Yang ◽  
Wenyan Li ◽  
Lingjie Zhang ◽  
Jiajie Zhao ◽  
...  
Keyword(s):  
Glass Ceramics ◽  
Aluminosilicate Glass ◽  
Lithium Aluminosilicate
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