LTV-FIR command prefiltering for vibration reduction of a flexure-jointed X-Y motion stage with payload variation
2021 ◽
Vol 1137
(1)
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pp. 012056
1991 ◽
Keyword(s):
2021 ◽
Vol 13
(2)
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pp. 168781402199497
2021 ◽
pp. 146134842098533
Keyword(s):
Keyword(s):
2003 ◽
Vol 3
(2)
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pp. 01-10
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