Design and evaluation of a micro resonator structure as a biosensor for droplet analysis with a standard fabrication method

Sensor Review ◽  
2022 ◽  
Vol ahead-of-print (ahead-of-print) ◽  
Author(s):  
Amin Eidi ◽  
Mousa Shamsi ◽  
Habib Badri Ghavifekr
Keyword(s):  
Electromechanical Coupling ◽  
Damping Factor ◽  
Aqueous Environment ◽  
Fabrication Method ◽  
Mechanical Resonator ◽  
Micro Electro Mechanical Systems ◽  
Content Type ◽  
Resonator Structure ◽  
Mems Technology ◽  
Target Molecules

Purpose In this work, the sensing and actuating elements are designed with interdigitated capacitors away from the sensitive element on which the droplet is placed. This pattern helps to prevent interference of electrical elements with the droplet. Choosing shear resonance mode at this proposed structure minimizes the damping effect of droplet touch by the resonator structure. The glass-based standard fabrication method of the proposed biosensor is presented exactly. Design/methodology/approach Mechanical resonator sensors are extremely limited because of the high damping factor and the high electrical conductivity in the aqueous environment. In this work, a molecule detector biosensor is proposed for droplet analysis, which is possible to fabricate using micro-electro-mechanical systems (MEMS) technology. By electromechanical coupling of resonators as a mechanical resonator structure, a standing mechanical wave is formed at this structure by electrostatic actuating elements. Findings In this paper, a mechanical resonator structure as a biosensor is proposed for micro-droplet analysis that can be fabricated by MEMS technology. It is designed at a lower cost fabrication method using electrostatic technology and interdigitated capacitors. The response of the biosensor displacement frequency at the resonance frequency of the desired mode is reasonable for measuring the capacitive changes of its output. The mass sensitivity of the proposed biosensor is in the range of 1 ng, and it has a large sensitive area for capturing target molecules. Originality/value To evaluate the quality of the proposed design, the stimulated analysis is conducted by COMSOL and results are presented.

scholarly journals Dynamic Modeling and Anti-Disturbing Control of an Electromagnetic MEMS Torsional Micromirror Considering External Vibrations in Vehicular LiDAR

Micromachines ◽  
2021 ◽  
Vol 12 (1) ◽  
pp. 69
Author(s):  
Yong Hua ◽  
Shuangyuan Wang ◽  
Bingchu Li ◽  
Guozhen Bai ◽  
Pengju Zhang
Keyword(s):  
Dynamic Model ◽  
Optical Switching ◽  
Control Method ◽  
Sliding Mode ◽  
Algorithm Design ◽  
Coupling Model ◽  
Micro Electro Mechanical Systems ◽  
Mems Technology ◽  
Torsional Micromirror ◽  
Dynamic Coupling Model

Micromirrors based on micro-electro-mechanical systems (MEMS) technology are widely employed in different areas, such as optical switching and medical scan imaging. As the key component of MEMS LiDAR, electromagnetic MEMS torsional micromirrors have the advantages of small size, a simple structure, and low energy consumption. However, MEMS micromirrors face severe disturbances due to vehicular vibrations in realistic use situations. The paper deals with the precise motion control of MEMS micromirrors, considering external vibration. A dynamic model of MEMS micromirrors, considering the coupling between vibration and torsion, is proposed. The coefficients in the dynamic model were identified using the experimental method. A feedforward sliding mode control method (FSMC) is proposed in this paper. By establishing the dynamic coupling model of electromagnetic MEMS torsional micromirrors, the proposed FSMC is evaluated considering external vibrations, and compared with conventional proportion-integral-derivative (PID) controls in terms of robustness and accuracy. The simulation experiment results indicate that the FSMC controller has certain advantages over a PID controller. This paper revealed the coupling dynamic of MEMS micromirrors, which could be used for a dynamic analysis and a control algorithm design for MEMS micromirrors.

A self-developed indoor three-dimensional pedestrian localization platform based on MEMS sensors

Sensor Review ◽  
2015 ◽  
Vol 35 (2) ◽  
pp. 157-167 ◽  
Author(s):  
Shengbo Sang ◽  
Ruiyong Zhai ◽  
Wendong Zhang ◽  
Qirui Sun ◽  
Zhaoying Zhou
Keyword(s):  
Low Cost ◽  
Angular Rate ◽  
Three Dimensional ◽  
Dead Reckoning ◽  
Rate Data ◽  
Mems Sensors ◽  
Micro Electro Mechanical Systems ◽  
Content Type ◽  
Position Errors ◽  
Low Performance

Purpose – This study aims to design a new low-cost localization platform for estimating the location and orientation of a pedestrian in a building. The micro-electro-mechanical systems (MEMS) sensor error compensation and the algorithm were improved to realize the localization and altitude accuracy. Design/methodology/approach – The platform hardware was designed with common low-performance and inexpensive MEMS sensors, and with a barometric altimeter employed to augment altitude measurement. The inertial navigation system (INS) – extended Kalman filter (EKF) – zero-velocity updating (ZUPT) (INS-EKF-ZUPT [IEZ])-extended methods and pedestrian dead reckoning (PDR) (IEZ + PDR) algorithm were modified and improved with altitude determined by acceleration integration height and pressure altitude. The “AND” logic with acceleration and angular rate data were presented to update the stance phases. Findings – The new platform was tested in real three-dimensional (3D) in-building scenarios, achieved with position errors below 0.5 m for 50-m-long route in corridor and below 0.1 m on stairs. The algorithm is robust enough for both the walking motion and the fast dynamic motion. Originality/value – The paper presents a new self-developed, integrated platform. The IEZ-extended methods, the modified PDR (IEZ + PDR) algorithm and “AND” logic with acceleration and angular rate data can improve the high localization and altitude accuracy. It is a great support for the increasing 3D location demand in indoor cases for universal application with ordinary sensors.

Solvent-Based Polymer Swelling Characterization for the Development of the Nano/Micro-Particle Polymer Composite MEMS Corrosion Sensor

2014 ◽  
Author(s):  
Feng Pan ◽  
Abdoul Kader Maiga ◽  
Po-Hao Adam Huang
Keyword(s):  
Reaction Products ◽  
Material Transport ◽  
Sensing Element ◽  
Micro Electro Mechanical Systems ◽  
Polymer Swelling ◽  
Corrosion Sensor ◽  
Mems Technology ◽  
New Type ◽  
Oxide Removal

The concept of using Micro-Electro-Mechanical Systems (MEMS) for in-situ corrosion sensing and for long-term applications has been proposed and is currently under development by our research lab. This is a new type of sensing using MEMS technology and, to the knowledge of our team, has not been explored previously. The MEMS corrosion sensor is based on the oxidation of metal nano/micro-particle embedded in elastomeric polymer to form a composite sensing element. The polymer controls the diffusion into and out of the sensor while the corrosion of the metal particles inhibits electrical conduction which is used as the detection signal. The work presented here is based on part of the methods developed for the removal of native and process-induced metal oxides. A major aspect is the study of the swelling dynamics of the polymer matrix (polydimethylsiloxane, PDMS) intended for enhancing material transport of etchants into and reaction products out of the composite during oxide removal. More specifically, the characterization of the swelling of copper particles-PDMS composite samples in liquid solvent baths is presented.

scholarly journals A Miniature Optical Force Dual-Axis Accelerometer Based on Laser Diodes and Small Particles Cavities

Micromachines ◽  
2021 ◽  
Vol 12 (11) ◽  
pp. 1375
Author(s):  
Junji Pu ◽  
Kai Zeng ◽  
Yulie Wu ◽  
Dingbang Xiao
Keyword(s):  
Light Source ◽  
Optical System ◽  
High Sensitivity ◽  
Measurement Range ◽  
Optical Force ◽  
Zero Bias ◽  
Micro Electro Mechanical Systems ◽  
Force Effect ◽  
High Measurement ◽  
Mems Technology

In recent years, the optical accelerometer based on the optical trapping force effect has gradually attracted the attention of researchers for its high sensitivity and high measurement accuracy. However, due to its large size and the complexity of optical path adjustment, the optical force accelerometers reported are only suitable for the laboratory environment up to now. In this paper, a miniature optical force dual-axis accelerometer based on the miniature optical system and a particles cavity which is prepared by Micro-Electro-Mechanical Systems (MEMS) technology is proposed. The overall system of the miniature optical levitation including the miniature optical system and MEMS particles cavity is a cylindrical structure with a diameter of about 10 mm and a height of 33 mm (Φ 10 mm × 33 mm). Moreover, the size of this accelerometer is 200 mm × 100 mm × 100 mm. Due to the selected light source being a laser diode light source with elliptical distribution, it is sensitive to the external acceleration in both the long axis and the short axis. This accelerometer achieves a measurement range of ±0.17 g–±0.26 g and measurement resolution of 0.49 mg and 1.88 mg. The result shows that the short-term zero-bias stability of the two orthogonal axes of the optical force accelerometer is 4.4 mg and 9.2 mg, respectively. The main conclusion that can be drawn is that this optical force accelerometer could provide an effective solution for measuring acceleration with an optical force effect for compact engineering devices.

scholarly journals Micro-electro-mechanical systems (MEMS): Technology for the 21st century

2014 ◽  
Vol 68 (5) ◽  
pp. 629-641 ◽  
Author(s):  
Tatjana Djakov ◽  
Ivanka Popovic ◽  
Ljubinka Rajakovic
Keyword(s):  
21St Century ◽  
Low Cost ◽  
Mechanical Systems ◽  
Modern Society ◽  
Global Scale ◽  
Thermal Constant ◽  
Mems Devices ◽  
Micro Electro Mechanical Systems ◽  
Industrial Sectors ◽  
Mems Technology

Micro-electro-mechanical systems (MEMS) are miniturized devices that can sense the environment, process and analyze information, and respond with a variety of mechanical and electrical actuators. MEMS consists of mechanical elements, sensors, actuators, electrical and electronics devices on a common silicon substrate. Micro-electro-mechanical systems are becoming a vital technology for modern society. Some of the advantages of MEMS devices are: very small size, very low power consumption, low cost, easy to integrate into systems or modify, small thermal constant, high resistance to vibration, shock and radiation, batch fabricated in large arrays, improved thermal expansion tolerance. MEMS technology is increasingly penetrating into our lives and improving quality of life, similar to what we experienced in the microelectronics revolution. Commercial opportunities for MEMS are rapidly growing in broad application areas, including biomedical, telecommunication, security, entertainment, aerospace, and more in both the consumer and industrial sectors on a global scale. As a breakthrough technology, MEMS is building synergy between previously unrelated fields such as biology and microelectronics. Many new MEMS and nanotechnology applications will emerge, expanding beyond that which is currently identified or known. MEMS are definitely technology for 21st century.

scholarly journals On-Demand MEMS Device Production System by Module-Based Microfactory

2010 ◽  
Vol 4 (2) ◽  
pp. 110-116 ◽  
Author(s):  
Kiwamu Ashida ◽  
◽  
Shizuka Nakano ◽  
Jaehyuk Park ◽  
Jun Akedo
Keyword(s):  
Production System ◽  
High Performance ◽  
Thin Sheet ◽  
Aerosol Deposition ◽  
Micro Electro Mechanical Systems ◽  
Unit Process ◽  
On Demand ◽  
Mems Technology ◽  
Thin Sheet Metal ◽  
Mems Device

Many micro-scale devices have been developed by applying micro-electro-mechanical systems (MEMS) technology, but MEMS production facilities are large and costly, making it difficult to develop small numbers of trial devices. The novel on-demand MEMS device production system we developed applies two major concepts – that of the microfactory and the introduction of non-MEMS processes in microfabrication. These two concepts have made manufacturing more ecological, economical, agile, and flexible through downsizing, forming an automated production line by connecting standardized unit-processing cells, each of which has a desktop process, a part transfer robot, and a standardized connection interface. These enable any process cell to be connected in any sequence that the target product requires. Four unit-process cells were developed – the micropress cell for fabricating microstructures from thin sheet metal and the miniature aerosol deposition (AD) process cell for fabricating high-performance piezoelectric (PZT) ceramics actuators. The feasibility of the on-demand MEMS production system was demonstrated by the fabrication of a MEMS-like micromirror scanner, proving the potential of on-demand MEMS production in diversified small-lot production.

Polymer mechanics and tribology

2018 ◽  
Vol 70 (4) ◽  
pp. 764-772 ◽  
Author(s):  
Nikolai K. Myshkin ◽  
Alexander Kovalev
Keyword(s):  
Polymer Composites ◽  
Contact Mechanics ◽  
Tribological Behavior ◽  
Tribological Performance ◽  
Memory Storage ◽  
Polymer Mechanics ◽  
Micro Electro Mechanical Systems ◽  
Content Type ◽  
Storage Devices ◽  
Functional Additives

Purpose The purpose of this paper is to review the advances in mechanics and tribology of polymers and polymer-based materials. It is focused on the understanding of the correlation of contact mechanics and the tribological behavior of polymers and polymer composites by taking account of surface forces and adhesion in the contact. Design/methodology/approach Mechanical behavior of polymers is considered a viscoelasticity. Tribological performance is estimated while considering the parts of deformation and adhesion in friction arising in the contact. Surface energy, roughness, load and temperature effects on the tribological behavior of polymers are evaluated. Polymer composites produced by reinforcing and by the addition of functional additives are considered as materials for various applications in tribology. Particular attention is given to polymer-based nanocomposites. Findings A review of studies in tribology has shown that polymer-based materials can be most successfully used as self-lubricating components of sliding bearings. The use of the fillers provides changes in the tribological performance of neat polymers and widens their areas of application in the industry. Thin polymer films were found to be prospective lubricants for memory storage devices, micro-electro-mechanical systems and precision mechanisms. Further progress in polymer tribology should be achieved on solving the problems of contact mechanics, surface physics and tribochemistry by taking account of the scale factor. Originality/value The review is based on the experience of the authors in polymer mechanics and tribology, their research data and on data of many other literature sources published in this area. It can be useful for specialists in polymer research and industrial engineers working in tribology and industrial lubrication.

Scope of RF MEMS Technology for Microwave Circuits and Systems

2021 ◽  
pp. 1-22
Author(s):  
Kanthamani Sundharajan
Keyword(s):  
Rf Mems ◽  
Low Cost ◽  
Microwave Circuits ◽  
Micro Electro Mechanical Systems ◽  
Mems Switches ◽  
Phased Array Antennas ◽  
Array Antennas ◽  
Rf Mems Switches ◽  
Mems Technology ◽  
Key Issues

Micro-electro mechanical systems (MEMS) technology has facilitated the need for innovative approaches in the design and development of miniaturized, effective, low-cost radio frequency (RF) microwave circuits and systems. This technology is expected to have significant role in today's 5G applications for the development of reconfigurable architectures. This chapter presents an overview of the evolution of MEMS-based subsystems and devices, especially switches and phased array antennas. This chapter also discusses the key issues in design and analysis of RF MEMS-based devices, particularly with primary emphasis on RF MEMS switches and antennas.

Nanosensors and MEMS: connecting the nanoscale with the macro world with microscale technology

Sensor Review ◽  
2016 ◽  
Vol 36 (1) ◽  
pp. 1-6 ◽  
Author(s):  
Robert Bogue
Keyword(s):  
Short Introduction ◽  
Diverse Range ◽  
Content Type ◽  
Fully Integrated ◽  
Molecular Sensors ◽  
Silicon Devices ◽  
Multi Stage ◽  
Mems Technology ◽  
Micro Electromechanical System ◽  
Insight Into

Purpose – This paper aims to illustrate how sensors can be fabricated by combining nanomaterials with micro-electromechanical system (MEMS) technology and to give examples of recently developed devices arising from this approach. Design/methodology/approach – Following a short introduction, this paper first identifies the benefits of MEMS technology. It then discusses the techniques for integrating carbon nanotubes with MEMS and provides examples of physical and molecular sensors produced by these methods. Combining other gas-responsive nanomaterials with MEMS is then considered and finally techniques for producing graphene on silicon devices are discussed. Brief concluding comments are drawn. Findings – This shows that many physical and molecular sensors have been developed by combining nanomaterials with MEMS technology. These have been fabricated by a diverse range of techniques which are often complex and multi-stage, but significant progress has been made and some are compatible with standard CMOS processes, yielding fully integrated nanosensors. Originality/value – This provides an insight into how two key technologies are being combined to yield families of advanced sensors.

Options for additive rapid prototyping methods (3D printing) in MEMS technology

2014 ◽  
Vol 20 (5) ◽  
pp. 403-412 ◽  
Author(s):  
Victor A. Lifton ◽  
Gregory Lifton ◽  
Steve Simon
Keyword(s):  
3D Printing ◽  
Rapid Prototyping ◽  
Method Development ◽  
Fused Deposition Modeling ◽  
Microelectromechanical Systems ◽  
Mems Devices ◽  
Content Type ◽  
3D Print ◽  
Fused Deposition ◽  
Mems Technology

Purpose – This study aims to investigate the options for additive rapid prototyping methods in microelectromechanical systems (MEMS) technology. Additive rapid prototyping technologies, such as stereolithography (SLA), fused deposition modeling (FDM) and selective laser sintering (SLS), all commonly known as three-dimensional (3D) printing methods, are reviewed and compared with the resolution requirements of the traditional MEMS fabrication methods. Design/methodology/approach – In the 3D print approach, the entire assembly, parts and prototypes are built using various plastic and metal materials directly from the software file input, completely bypassing any additional processing steps. The review highlights their potential place in the overall process flow to reduce the complexity of traditional microfabrication and long processing cycles needed to test multiple prototypes before the final design is set. Findings – Additive manufacturing (AM) is a promising manufacturing technique in micro-device technology. Practical implications – In the current state of 3D printing, microfluidic and lab-on-a-chip devices for fluid handling and manipulation appear to be the most compatible with the 3D print methods, given their fairly coarse minimum feature size of 50-500 μm. Future directions in the 3D materials and method development are identified, such as adhesion and material compatibility studies of the 3D print materials, wafer-level printing and conductive materials development. One of the most important goals should be the drive toward finer resolution and layer thickness (1-10 μm) to stimulate the use of the 3D printing in a wider array of MEMS devices. Originality/value – The review combines two discrete disciplines, microfabrication and AM, and shows how microfabrication and micro-device commercialization may benefit from employing methods developed by the AM community.

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