Enabling Facility Re-Use for 300mm Semiconductor Manufacturing via Integration of Automated Material Handling System and Facility Design

The 17th Annual SEMI/IEEE ASMC 2006 Conference ◽

10.1109/asmc.2006.1638764 ◽

2006 ◽

Author(s):

S. Seall ◽

D.C. Steele ◽

M. Jung

Keyword(s):

Semiconductor Manufacturing ◽

Material Handling ◽

Material Handling System ◽

Facility Design ◽

Handling System ◽

Automated Material Handling System ◽

Automated Material Handling

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Deep Learning-Based Dynamic Scheduling for Semiconductor Manufacturing With High Uncertainty of Automated Material Handling System Capability

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2020.2965293 ◽

2020 ◽

Vol 33 (1) ◽

pp. 13-22 ◽

Cited By ~ 1

Author(s):

Haejoong Kim ◽

Dae-Eun Lim ◽

Sangmin Lee

Keyword(s):

Deep Learning ◽

Semiconductor Manufacturing ◽

Material Handling ◽

Dynamic Scheduling ◽

Material Handling System ◽

Handling System ◽

Automated Material Handling System ◽

Automated Material Handling ◽

High Uncertainty ◽

System Capability

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Dynamic vehicle allocation control for automated material handling system in semiconductor manufacturing

Computers & Operations Research ◽

10.1016/j.cor.2013.04.007 ◽

2013 ◽

Vol 40 (10) ◽

pp. 2329-2339 ◽

Cited By ~ 12

Author(s):

James T. Lin ◽

Cheng-Hung Wu ◽

Chih-Wei Huang

Keyword(s):

Semiconductor Manufacturing ◽

Material Handling ◽

Material Handling System ◽

Handling System ◽

Automated Material Handling System ◽

Automated Material Handling ◽

Vehicle Allocation

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Development of Deep-Learning-Based Scheduling Approach to Improve the Automated Material Handling System Throughput Capacity in a Semiconductor Manufacturing Facility

Journal of the Korea Management Engineers Society ◽

10.35373/kmes.24.2.5 ◽

2019 ◽

Vol 24 (1) ◽

pp. 73-83

Author(s):

Hae Joong Kim ◽

Dae-Eun Lim ◽

Sang Min Lee

Keyword(s):

Deep Learning ◽

Semiconductor Manufacturing ◽

Material Handling ◽

Throughput Capacity ◽

System Throughput ◽

Material Handling System ◽

Handling System ◽

Manufacturing Facility ◽

Automated Material Handling System ◽

Automated Material Handling

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A Novel Vehicle Pre-dispatching Method for Automated Material Handling System in Semiconductor Manufacturing

Proceedings of 2012 3rd International Asia Conference on Industrial Engineering and Management Innovation (IEMI2012) ◽

10.1007/978-3-642-33012-4_86 ◽

2012 ◽

pp. 861-872 ◽

Cited By ~ 1

Author(s):

James T. Lin ◽

Chih-Wei Huang

Keyword(s):

Semiconductor Manufacturing ◽

Material Handling ◽

Material Handling System ◽

Handling System ◽

Automated Material Handling System ◽

Automated Material Handling

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A novel vehicle assignment method for automated material handling system in semiconductor manufacturing

2011 IEEE 18th International Conference on Industrial Engineering and Engineering Management ◽

10.1109/icieem.2011.6035471 ◽

2011 ◽

Cited By ~ 1

Author(s):

James T. Lin ◽

Chih-Wei Huang

Keyword(s):

Semiconductor Manufacturing ◽

Material Handling ◽

Material Handling System ◽

Handling System ◽

Assignment Method ◽

Automated Material Handling System ◽

Vehicle Assignment ◽

Automated Material Handling

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Flexible automated material handling system

Journal of Mechanical Working Technology ◽

10.1016/0378-3804(89)90051-x ◽

1989 ◽

Vol 20 ◽

pp. 433-440

Author(s):

A. Kader Mazouz ◽

Chingping Han

Keyword(s):

Material Handling ◽

Material Handling System ◽

Handling System ◽

Automated Material Handling System ◽

Automated Material Handling

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Intelligent supervisory system for availability estimation of automated material handling system

Advances in Safety, Reliability and Risk Management ◽

10.1201/b11433-398 ◽

2011 ◽

pp. 2797-2804

Author(s):

J Smoczek ◽

J Szpytko

Keyword(s):

Material Handling ◽

Material Handling System ◽

Handling System ◽

Supervisory System ◽

Automated Material Handling System ◽

Automated Material Handling

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The design of an automated material handling system for a job shop

Computers in Industry ◽

10.1016/0166-3615(83)90019-2 ◽

1983 ◽

Vol 4 (2) ◽

pp. 139-145 ◽

Cited By ~ 4

Author(s):

G.K. Hutchinson

Keyword(s):

Material Handling ◽

Job Shop ◽

Material Handling System ◽

Handling System ◽

Automated Material Handling System ◽

Automated Material Handling

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Design and simulation of integration system between automated material handling system and manufacturing layout in the automotive assembly line

IOP Conference Series Materials Science and Engineering ◽

10.1088/1757-899x/257/1/012017 ◽

2017 ◽

Vol 257 ◽

pp. 012017

Author(s):

S Seha ◽

J Zamberi ◽

A J Fairu

Keyword(s):

Material Handling ◽

Assembly Line ◽

Material Handling System ◽

Integration System ◽

Handling System ◽

Automated Material Handling System ◽

Automotive Assembly ◽

Automated Material Handling

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Single Direction Traffic Rule for GRID System - An Innovative Automated Material Handling System

2018 IEEE 14th International Conference on Automation Science and Engineering (CASE) ◽

10.1109/coase.2018.8560590 ◽

2018 ◽

Cited By ~ 1

Author(s):

Chenhao Zhou ◽

Haobin Li ◽

Loo Hay Lee ◽

Ek Peng Chew

Keyword(s):

Material Handling ◽

Material Handling System ◽

Grid System ◽

Handling System ◽

Automated Material Handling System ◽

Automated Material Handling ◽

Traffic Rule

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