Growth of AlInGaP in multiwafer planetary reactors(R)

Conference Proceedings. 1998 International Conference on Indium Phosphide and Related Materials (Cat. No.98CH36129) ◽

10.1109/iciprm.1998.712657 ◽

2002 ◽

Author(s):

R. Beccard ◽

H. Protzmann ◽

D. Schmitz ◽

D. Strauch ◽

M. Heuken ◽

...

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