Novel Electroplating-Based Technology for the Fabrication of Giant Micromirrors for Space and Terrestrial Applications

Proceedings. 2004 International Conference on MEMS, NANO and Smart Systems, 2004. ICMENS 2004. ◽

10.1109/icmens.2004.1508956 ◽

2006 ◽

Author(s):

S. Ilias ◽

P. Topart ◽

S. Leclair ◽

J. Cote ◽

Loic Le Noc ◽

...

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