Incorporation of a tungsten pedestal structure into the nanotriode device

IEEE/CPMT/SEMI. 28th International Electronics Manufacturing Technology Symposium (Cat. No.03CH37479) ◽

10.1109/ivmc.2003.1223008 ◽

2004 ◽

Author(s):

A.M. Blackburn ◽

D.G. Hasko ◽

D.A. Williams ◽

H. Ahmed

Download Full-text