DC breakdown and TDDB study of ALD SiO2 on GaN

2012 Lester Eastman Conference on High Performance Devices (LEC) ◽

10.1109/lec.2012.6410987 ◽

2012 ◽

Author(s):

Shinya Takashima ◽

Zhongda Li ◽

T. Paul Chow

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