A New High-Sensitivity Package-Leak Testing Method for MEMS Sensors

Author(s):  
M. Fujiyoshi ◽  
Y. Nonomura ◽  
H. Senda
1955 ◽  
Vol 58 (441) ◽  
pp. 731-736
Author(s):  
Takeshi AKUTAGAWA ◽  
Toshio FUJITA ◽  
Kazuo TAKEMURA

2003 ◽  
Vol 114 (4) ◽  
pp. 1926-1933 ◽  
Author(s):  
Eric Huang ◽  
David R. Dowling ◽  
Timothy Whelan ◽  
John L. Spiesberger

2021 ◽  
Vol 34 (1) ◽  
Author(s):  
Jianbo Wu ◽  
Wenqiang Wu ◽  
Erlong Li ◽  
Yihua Kang

AbstractAs a promising non-destructive testing (NDT) method, magnetic flux leakage (MFL) testing has been widely used for steel structure inspection. However, MFL testing still faces a great challenge to detect inner defects. Existing MFL course researches mainly focus on surface-breaking defects while that of inner defects is overlooked. In the paper, MFL course of inner defects is investigated by building magnetic circuit models, performing numerical simulations, and conducting MFL experiments. It is found that the near-surface wall has an enhancing effect on the MFL course due to higher permeability of steel than that of air. Further, a high-sensitivity MFL testing method consisting of Helmholtz coil magnetization and induction coil with a high permeability core is proposed to increase the detectable depth of inner defects. Experimental results show that inner defects with buried depth up to 80.0 mm can be detected, suggesting that the proposed MFL method has the potential to detect deeply-buried defects and has a promising future in the field of NDT.


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