Diamond technology for electronics and MEMS: review of status and perspectives

2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595) ◽

10.1109/miel.2002.1003149 ◽

2003 ◽

Author(s):

E. Kohn ◽

W. Ebert ◽

A. Aleksov ◽

A. Denisenko ◽

M. Adamschik ◽

...

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