Design and simulation of an active electrostatic bearing for MEMS micromotors

2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems ◽

10.1109/nems.2009.5068531 ◽

2009 ◽

Author(s):

Fengtian Han ◽

Zhenbin Fu ◽

Jingxin Dong

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